PMID: 15244953Jul 13, 2004Paper

Numerical investigation of particle formation mechanisms in silane discharges

Physical Review. E, Statistical, Nonlinear, and Soft Matter Physics
Kathleen De BleeckerWim Goedheer

Abstract

The formation of particles in low-pressure silane discharges has been studied extensively over the last decade. In this paper we try to identify, by numerical simulations, the precursors of the dust formation and we examine the gas-phase reactions leading to larger clusters, and finally to nanometer or micrometer sized particles. A one-dimensional fluid model is used, which incorporates silicon hydrides (Si(n)H(m)) containing up to 12 silicon atoms. A set of 68 species, including neutrals, radicals, ions, and electrons, is taken into account. The importance of various cluster reaction sequences is discussed. Besides the discussion of ion-molecule and ion-ion reactions, the role of the vibrationally excited silane molecules and of SiH3 radicals on the particle growth process is studied. Finally, the effect of temperature variation on the density of the dust particles is investigated.

References

Jun 1, 1980·Environmental Health Perspectives·L G Christophorou
Apr 15, 1990·Physical Review. a·P Belenguer, J P Boeuf
Nov 23, 2000·Physical Review. E, Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics·A Gallagher

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Citations

Apr 12, 2007·Analytical and Bioanalytical Chemistry·Tom MartensJan van Dijk
Apr 12, 2006·Physical Review. E, Statistical, Nonlinear, and Soft Matter Physics·Kathleen De BleeckerWim Goedheer
Dec 17, 2004·Physical Review. E, Statistical, Nonlinear, and Soft Matter Physics·Kathleen De BleeckerWim Goedheer
Mar 24, 2005·Physical Review. E, Statistical, Nonlinear, and Soft Matter Physics·K Ostrikov
Apr 28, 2009·Physical Review. E, Statistical, Nonlinear, and Soft Matter Physics·Lavanya Ravi, Steven L Girshick
Apr 7, 2010·Physical Review. E, Statistical, Nonlinear, and Soft Matter Physics·Xiang-Mei LiuYou-Nian Wang
Aug 11, 2005·Physical Review. E, Statistical, Nonlinear, and Soft Matter Physics·Kathleen De BleeckerWim Goedheer

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