Observation of three-dimensional elemental distributions of a Si device using a 360 degrees -tilt FIB and the cold field-emission STEM system

Ultramicroscopy
Toshie YaguchiMasashi Watanabe

Abstract

A technique for preparation of a pillar-shaped specimen and its multidirectional observation using a combination of a scanning transmission electron microscope (STEM) and a focused ion beam (FIB) instrument has been developed. The system employs an FIB/STEM compatible holder with a specially designed tilt mechanism, which allows the specimen to be tilted through 360 degrees [T. Yaguchi, M. Konno, T. Kamino, T. Hashimoto, T. Ohnishi, K. Umemura, K. Asayama, Microsc. Microanal. 9 (Suppl. 2) (2003) 118; T. Yaguchi, M. Konno, T. Kamino, T. Hashimoto, T. Ohnishi, M. Watanabe, Microsc. Microanal. 10 (Suppl. 2) (2004) 1030]. This technique was applied to obtain the three-dimensional (3D) elemental distributions around a contact plug of a Si device used in a 90-nm technology. A specimen containing only one contact plug was prepared in the shape of a pillar with a diameter of 200nm and a length of 5mum. Elemental maps were obtained from the pillar specimen using a 200-kV cold-field emission gun (FEG) STEM model HD-2300C equipped with the EDAX genesis X-ray energy-dispersive spectrometry (XEDS) system through a spectrum imaging technique. In this study, elemental distributions of minor elements with weak signals were enhanced by applying...Continue Reading

References

Dec 8, 2004·Journal of Electron Microscopy·Takeo KaminoMasako Osumi
Dec 8, 2004·Journal of Electron Microscopy·Takeo KaminoTohru Ishitani
Oct 1, 2005·Science·I ArslanP A Midgley

❮ Previous
Next ❯

Citations

Dec 29, 2011·ACS Applied Materials & Interfaces·Takuya OmataMasahiro Watanabe
May 17, 2013·Ultramicroscopy·Arda GencChongmin Wang
Mar 2, 2010·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Xiaoxing KeGustaaf Van Tendeloo
Apr 9, 2010·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Chad M Parish, Luke N Brewer
Apr 11, 2013·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Georg HaberfehlnerPierre Bleuet
Apr 12, 2013·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·P BleuetJ Villanova
Jan 19, 2016·Ultramicroscopy·Thomas J A SlaterSarah J Haigh
Feb 16, 2013·Micron : the International Research and Review Journal for Microscopy·K LepinayT Epicier
Nov 28, 2013·Ultramicroscopy·Colin M Palmer, Jan Löwe
Oct 25, 2016·Micron : the International Research and Review Journal for Microscopy·Misa Hayashida, Marek Malac
Apr 30, 2019·Advanced Structural and Chemical Imaging·Pavel Potapov, Axel Lubk
Nov 21, 2020·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Misa HayashidaKiichi Fukui
Sep 21, 2019·Micron : the International Research and Review Journal for Microscopy·Rinyaporn PhengchatKiichi Fukui
Mar 19, 2021·Chromosome Research : an International Journal on the Molecular, Supramolecular and Evolutionary Aspects of Chromosome Biology·Rinyaporn PhengchatMisa Hayashida
Jun 26, 2021·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Frances I AllenAndrew M Minor
Apr 24, 2019·ACS Applied Materials & Interfaces·Mariusz AndrzejczukMałgorzata Lewandowska
Jan 9, 2017·ACS Biomaterials Science & Engineering·Xiaoyue WangKathryn Grandfield

❮ Previous
Next ❯

Related Concepts

Related Feeds

Antifungals

An antifungal, also known as an antimycotic medication, is a pharmaceutical fungicide or fungistatic used to treat and prevent mycosis such as athlete's foot, ringworm, candidiasis, cryptococcal meningitis, and others. Discover the latest research on antifungals here.

Antifungals (ASM)

An antifungal, also known as an antimycotic medication, is a pharmaceutical fungicide or fungistatic used to treat and prevent mycosis such as athlete's foot, ringworm, candidiasis, cryptococcal meningitis, and others. Discover the latest research on antifungals here.

Related Papers

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
Xiaoxing KeG Van Tendeloo
Micron : the International Research and Review Journal for Microscopy
G LucasC Hébert
Ultramicroscopy
Günter MöbusBeverley J Inkson
© 2022 Meta ULC. All rights reserved