Occupational Exposure to Airborne Nanomaterials: An Assessment of Worker Exposure to Aerosolized Metal Oxide Nanoparticles in Semiconductor Wastewater Treatment

Journal of Occupational and Environmental Hygiene
Sara BrennerIgor G Zurbenko

Abstract

This study characterized potential inhalation exposures of workers to nanometal oxides associated with industrial wastewater treatment processes in a semiconductor research and development facility. Exposure assessment methodology was designed to capture aerosolized engineered nanomaterials associated with the chemical mechanical planarization wafer polishing process that were accessible for worker contact via inhalation in the on-site wastewater treatment facility. The research team conducted air sampling using a combination of filter-based capture methods for particle identification and characterization and real-time direct-reading instruments for semi-quantitation of particle number concentration. Filter-based samples were analyzed using electron microscopy and energy-dispersive x-ray spectroscopy while real-time particle counting data underwent statistical analysis. Sampling conducted over 14 months included 5 discrete sampling series events for 7 job tasks in coordination with on-site employees. The number of filter-based samples captured for analysis by electron microscopy was: 5 from personal breathing zone, 4 from task areas, and 3 from the background. Direct-reading instruments collected data for 5 sample collection pe...Continue Reading

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Citations

Feb 13, 2016·Microscopy Research and Technique·María Del Pilar Sosa PeñaSara A Brenner
Sep 7, 2016·Journal of Nanoparticle Research : an Interdisciplinary Forum for Nanoscale Science and Technology·P A SchulteJ Howard
Sep 10, 2016·Particle and Fibre Toxicology·Matthew S P BoylesChristian G Huber
May 14, 2016·Journal of Occupational and Environmental Hygiene·Sara A BrennerCharles L Geraci
Dec 29, 2017·Drug and Chemical Toxicology·Shweta PatelRanjitsinh Devkar
Jun 9, 2021·Current Environmental Health Reports·Seth McCormickMatthew M Dahm

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Methods Mentioned

BETA
x-ray
scanning
transmission electron microscopy
transmission
x-ray spectroscopy
mechanical filtration

Software Mentioned

R
iATL

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