On the role of micro-porosity in affecting the environmental stability of atomic/molecular layer deposited (ZnO)a (Zn-O-C6 H4 -O)b films

Dalton Transactions : an International Journal of Inorganic Chemistry
Morteza AghaeeMariadriana Creatore

Abstract

Atomic/molecular layer deposited (ALD/MLD) inorganic-organic thin films form a novel class of materials with tunable properties. In selected cases, hybrid materials are reported to show environmental instability, specifically towards moisture. In this article, we focus on zinc oxide/zincone multi-layers with the theoretical formula of (ZnO)a(Zn-O-C6H4-O)b. We show by means of ellipsometric porosimetry that micro-porosity in the range of 0.42 and 2 nm in the pristine zincone layer is responsible for its environmental degradation. During degradation, it is found that a relative micro-porosity content of 1.2 ± 0.1 vol% in the pristine zincone films evolves into micro-mesoporosity with a relative content of 39 ± 1 vol%. We also show that the micro-porosity in the zincone layer can be gradually suppressed when few cycles (a = 1-10) of ZnO are introduced. The resulting (ZnO)a(Zn-O-C6H4-O)b = 1 periodic multilayer is an environmentally stable film with a = 10. It is found that the suppressed micro-porosity is due to the development of continuous ZnO layers with a≥ 10.

References

Dec 1, 2007·Journal of the American Chemical Society·Byoung H LeeMyung M Sung
Dec 2, 2009·Chemical Reviews·Steven M George
Nov 3, 2010·Dalton Transactions : an International Journal of Inorganic Chemistry·Karina Barnholt KlepperHelmer Fjellvåg
Aug 28, 2014·Beilstein Journal of Nanotechnology·Pia Sundberg, Maarit Karppinen
Nov 8, 2014·Dalton Transactions : an International Journal of Inorganic Chemistry·Janne-Petteri Niemelä, Maarit Karppinen
Sep 24, 2015·ACS Applied Materials & Interfaces·Anne-Marije AndringaMariadriana Creatore
Dec 15, 2015·Dalton Transactions : an International Journal of Inorganic Chemistry·Kevin Van de KerckhoveChristophe Detavernier
Mar 9, 2017·Dalton Transactions : an International Journal of Inorganic Chemistry·Kevin Van de KerckhoveChristophe Detavernier
Apr 13, 2018·Dalton Transactions : an International Journal of Inorganic Chemistry·Kevin Van de KerckhoveChristophe Detavernier
May 26, 2018·Dalton Transactions : an International Journal of Inorganic Chemistry·Alberto PerrottaMariadriana Creatore

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Citations

May 1, 2020·Nanotechnology·Karina AshurbekovaMato Knez
Jul 24, 2020·Dalton Transactions : an International Journal of Inorganic Chemistry·Janne-Petteri NiemeläIvo Utke
Sep 12, 2019·Dalton Transactions : an International Journal of Inorganic Chemistry·Alberto PerrottaAnna Maria Coclite
Feb 20, 2020·Carbohydrate Polymers·Lipeng LiuYuan Yuan
May 11, 2021·Dalton Transactions : an International Journal of Inorganic Chemistry·Alexander John CruzRob Ameloot

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