On the Use of Scalable NanoISFET Arrays of Silicon with Highly Reproducible Sensor Performance for Biosensor Applications

ACS Omega
Dipti RaniSven Ingebrandt

Abstract

As a prerequisite to the development of real label-free bioassay applications, a high-throughput top-down nanofabrication process is carried out with a combination of nanoimprint lithography, anisotropic wet-etching, and photolithography methods realizing nanoISFET arrays that are then analyzed for identical sensor characteristics. Here, a newly designed array-based sensor chip exhibits 32 high aspect ratio silicon nanowires (SiNWs) laid out in parallel with 8 unit groups that are connected to a very highly doped, Π-shaped common source and individual drain contacts. Intricately designed contact lines exert equal feed-line resistances and capacitances to homogenize the sensor response as well as to minimize parasitic transport effects and to render easy integration of a fluidic layer on top. The scalable nanofabrication process as outlined in this article casts out a total of 2496 nanowires (NWs) on a 4 inch p-type silicon-on-insulator (SOI) wafer, yielding 78 sensor chips based on nanoISFET arrays. The sensor platform exhibiting high-performance transistor characteristics in buffer solutions is thoroughly characterized using state-of-the-art surface and electrical measurement techniques. Deploying a pH sensor in liquid buffers...Continue Reading

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Citations

Aug 14, 2019·Advanced Science·Larysa BarabanGianaurelio Cuniberti
Feb 9, 2017·Nanotechnology·Tong YangJeffrey M Mativetsky
Jul 30, 2020·Analytical and Bioanalytical Chemistry·Dipti RaniVivek Pachauri
Nov 7, 2018·Biosensors & Bioelectronics·Walid-Madhat MuniefSven Ingebrandt

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Methods Mentioned

BETA
enzyme-linked immunosorbent assays
biosensor
chips
chip
scanning electron microscopy
AFM

Software Mentioned

Stopping and Range of Ions in Matter ( SRIM )
LabView
Clewin

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