Patterning Multicolor Hybrid Perovskite Films via Top-Down Lithography

ACS Nano
Jonathon HarwellIfor D W Samuel

Abstract

Lead-halide perovskites have attracted great attention due to their excellent optoelectronic properties, with rapid progress being made in their performance as light-emitting diodes (LEDs), photodiodes, and solar cells. Demonstrating large scale, high-resolution patterning of perovskites is a key enabling step to unlock their full potential for a range of optoelectronic applications. However, the development of a successful top-down lithography fabrication procedure has so far been hampered by the incompatibility of perovskite films with the solvents used during lithographic processes. Here, we perform a study on the effect of different lithographic solvents on perovskite films and use this insight to develop photolithography and electron-beam lithography procedures for patterning perovskite films. This procedure uses standard resists at low temperatures and achieves micron-scale features with flat tops. Furthermore, we expand this platform to produce arrays of multicolor pixels for potential commercial perovskite LED display applications.

References

Feb 5, 2015·Nano Letters·Wei ZhangHenry J Snaith
Jun 26, 2015·Nature Communications·Xin Yu ChinCesare Soci
Jun 28, 2016·Nature Nanotechnology·Mingjian YuanEdward H Sargent
Sep 20, 2016·The Journal of Physical Chemistry Letters·Nan ZhangQinghai Song
Jan 24, 2017·Advanced Materials·Xianxiong HeHongbing Fu
Jun 28, 2017·Proceedings of the National Academy of Sciences of the United States of America·Letian DouPeidong Yang
Sep 17, 2017·Scientific Reports·J R HarwellI D W Samuel
Aug 17, 2018·ACS Nano·Yisheng GaoShumin Xiao

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Citations

May 1, 2021·Nanomaterials·Muhammad T SajjadIfor D W Samuel
Dec 11, 2021·ACS Applied Materials & Interfaces·Pengfei ChengPeter Schaaf
Sep 14, 2020··Lih Y. LinChen Zou

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