Performing elemental microanalysis with high accuracy and high precision by scanning electron microscopy/silicon drift detector energy-dispersive X-ray spectrometry (SEM/SDD-EDS)

Journal of Materials Science
Dale E Newbury, Nicholas W M Ritchie

Abstract

Electron-excited X-ray microanalysis performed in the scanning electron microscope with energy-dispersive X-ray spectrometry (EDS) is a core technique for characterization of the microstructure of materials. The recent advances in EDS performance with the silicon drift detector (SDD) enable accuracy and precision equivalent to that of the high spectral resolution wavelength-dispersive spectrometer employed on the electron probe microanalyzer platform. SDD-EDS throughput, resolution, and stability provide practical operating conditions for measurement of high-count spectra that form the basis for peak fitting procedures that recover the characteristic peak intensities even for elemental combination where severe peak overlaps occur, such PbS, MoS2, BaTiO3, SrWO4, and WSi2. Accurate analyses are also demonstrated for interferences involving large concentration ratios: a major constituent on a minor constituent (Ba at 0.4299 mass fraction on Ti at 0.0180) and a major constituent on a trace constituent (Ba at 0.2194 on Ce at 0.00407; Si at 0.1145 on Ta at 0.0041). Accurate analyses of low atomic number elements, C, N, O, and F, are demonstrated. Measurement of trace constituents with limits of detection below 0.001 mass fraction (10...Continue Reading

References

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May 8, 2007·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Dale E Newbury
Dec 1, 2006·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Dale E Newbury
Aug 1, 2012·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Nicholas W M RitchieJeffrey M Davis
Oct 24, 2012·Analytical Chemistry·Nicholas W M Ritchie, Dale E Newbury
Sep 15, 2015·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Dale E Newbury, Nicholas W M Ritchie

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Citations

Oct 27, 2015·Microscopy·Šárka MikmekováHisato Noro
Sep 15, 2015·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Dale E Newbury, Nicholas W M Ritchie
Jun 23, 2016·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Dale E Newbury, Nicholas W M Ritchie
Aug 16, 2016·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Dale E Newbury, Nicholas W M Ritchie
Mar 11, 2017·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Michael Mengason, Nicholas Ritchie
Sep 4, 2018·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Dale E Newbury, Nicholas W M Ritchie
Feb 5, 2019·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Chaoyi TengRaynald Gauvin
Dec 21, 2019·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Ellen J Crapster-Pregont, Denton S Ebel
Jun 2, 2020·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Anders BrostrømKristian Mølhave
Jun 18, 2020·Journal of Biomedical Materials Research. Part B, Applied Biomaterials·Leyla HasandoostMark R Towler
Apr 15, 2020·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Aaron TorpyMohammad N Zaman
Jul 14, 2017·Frontiers in Physiology·Mariana Dos Reis LimaPaula Goes
Sep 3, 2018·Molecular Neurobiology·Mónica Álvarez-CórdobaJosé A Sánchez-Alcázar
Mar 9, 2019·Environmental Science and Pollution Research International·Marcela Nascimento SertorioMariana Machado-Neves
Jul 6, 2019·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Pedro ValérioEver Calvo
Apr 30, 2019·Advanced Structural and Chemical Imaging·Pavel Potapov, Axel Lubk
Aug 24, 2019·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Dale E Newbury, Nicholas W M Ritchie
Aug 18, 2018·Contrast Media & Molecular Imaging·Sakineh E MoghaddamLon J Wilson
Nov 19, 2020·Journal of Functional Biomaterials·Florin MiculescuLucian Toma Ciocan
May 8, 2021·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Felice NunziataMatteo Donghi

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Methods Mentioned

BETA
X-ray
electron
electron scattering

Software Mentioned

- II
msa
DTSA
Desktop Spectrum Analyzer
SDD
II
II EDS engine

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