Periodic large-area metallic split-ring resonator metamaterial fabrication based on shadow nanosphere lithography

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Michael Christian GwinnerHarald Giessen

Abstract

A fast and cheap, large-area (>1 cm(2)), high-coverage fabrication technique for periodic metallic split-ring resonator metamaterials is presented, which allows control of inner- and outer-ring diameters, gap angles, as well as thickness and periodicity. This method, based on shadow nanosphere lithography, uses tilted-angle-rotation thermal evaporation onto Langmuir-Blodgett-type monolayers of close-packed polystyrene nanospheres. Excellent agreement of the process parameters with a simplified model is demonstrated. Pronounced, tunable optical metamaterial resonances in the range of 100 THz are consistent with simulations.

References

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Citations

Jul 2, 2010·Journal of the American Chemical Society·Yoonho JunPaul V Braun
Sep 29, 2011·Langmuir : the ACS Journal of Surfaces and Colloids·Shengrong YeR Lloyd Carroll
Jan 10, 2012·ACS Nano·Yangjun CaiPaul S Cremer
Jun 29, 2013·ACS Nano·Bettina FrankHarald Giessen
Apr 13, 2013·Physical Chemistry Chemical Physics : PCCP·Daniel DarvillFang Xie
Jan 2, 2015·The Journal of Physical Chemistry. C, Nanomaterials and Interfaces·Kyunghee ChoRobert M Corn
Jan 27, 2015·Chemistry of Materials : a Publication of the American Chemical Society·Shikuan YangTony Jun Huang
Nov 16, 2010·Chemphyschem : a European Journal of Chemical Physics and Physical Chemistry·Ryosuke OgakiPeter Kingshott
Sep 15, 2011·Small·Piotr PatokaMichael Giersig
Jun 17, 2011·Small·Xiaozhu ZhouHua Zhang
May 30, 2015·ACS Nano·Kai ChenYuebing Zheng
Oct 14, 2010·Optics Express·A I KuznetsovB N Chichkov
May 20, 2011·Journal of Colloid and Interface Science·Liguo GaoLifeng Chi
Oct 30, 2010·Chemical Society Reviews·Yong LeiGerhard Wilde
Oct 25, 2012·Chemical Society Reviews·Yiding LiuYadong Yin
Apr 22, 2014·Journal of Materials Chemistry. C, Materials for Optical and Electronic Devices·Shikuan YangTony Jun Huang
Jan 19, 2013·Langmuir : the ACS Journal of Surfaces and Colloids·Ran YeHuanhuan Xu
Jan 15, 2013·Langmuir : the ACS Journal of Surfaces and Colloids·Xiaoyan SunZexin Zhang
Oct 23, 2009·Nanotechnology·Haixia XuXuehua Wang
Apr 7, 2017·Optics Express·Verena Kolb, Jens Pflaum
Jul 29, 2017·Monatshefte für chemie·Steffen KurzhalsRonald Zirbs
Nov 10, 2013·Beilstein Journal of Nanotechnology·Simon DickreuterPaul Leiderer
Oct 19, 2017·Optics Express·Bryan DebbrechtBrendan G DeLacy

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