Phase Imbalance Optimization in Interference Linear Displacement Sensor with Surface Gratings

Sensors
Sergey OdinokovDmitrii Lushnikov

Abstract

In interferential linear displacement sensors, accurate information about the position of the reading head is calculated out of a pair of quadrature (sine and cosine) signals. In double grating interference schemes, diffraction gratings combine the function of beam splitters and phase retardation devices. Specifically, the reference diffraction grating is located in the reading head and regulates the phase shifts in diffraction orders. Measurement diffraction grating moves along with the object and provides correspondence to the displacement coordinate. To stabilize the phase imbalance in the output quadrature signals of the sensor, we propose to calculate and optimize the parameters of these gratings, based not only on the energetic analysis, but along with phase relationships in diffraction orders. The optimization method is based on rigorous coupled-wave analysis simulation of the phase shifts of light in diffraction orders in the optical system. The phase properties of the reference diffraction grating in the interferential sensor are studied. It is confirmed that the possibility of quadrature modulation depends on parameters of static reference scale. The implemented optimization criteria are formulated in accordance with ...Continue Reading

References

May 2, 2018·Applied Optics·Jili DengChanghe Zhou
Oct 16, 2018·Biomedical Optics Express·Cesar G Tavera RuizFernando Mendoza Santoyo
Mar 6, 2019·The Review of Scientific Instruments·Martin WünscheChristian Rödel
Dec 25, 2019·Applied Optics·Victor DyominNikolay Yudin
Feb 8, 2020·Journal of Biomedical Optics·Manoj KumarOsamu Matoba

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