Plasma diagnostics for unraveling process chemistry

Annual Review of Analytical Chemistry
Joshua M StillahnEllen R Fisher

Abstract

This review focuses on the use of diagnostic tools to examine plasma processing chemistry, primarily plasma species energetics, dynamics, and molecule-surface reactions. We describe the use of optical diagnostic tools, mass spectrometry, and Langmuir probes in measuring species densities, rotational and kinetic energies, and plasma-surface reactions. Molecule-surface interactions for MX(n) species (M = C, Si, N; X = H, F, Cl) are presented and interpreted with respect to the molecule's electronic configuration and dipole moments.

References

Aug 1, 1996·Physical Review. E, Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics·R FoestJ R Roberts
Apr 24, 2002·Physical Review. E, Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics·M V Malyshev, V M Donnelly
May 22, 2002·Journal of the American Society for Mass Spectrometry·Keri L WilliamsEllen R Fisher
Jul 13, 2006·The Journal of Physical Chemistry. a·J L HuesoA Caballero
Jul 15, 2006·The Journal of Physical Chemistry. a·J BenediktM C M van de Sanden
Oct 27, 2006·The Journal of Physical Chemistry. B·Jie Zhou, Ellen R Fisher
Mar 27, 2007·The Journal of Chemical Physics·Tamas BakosDimitrios Maroudas

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Citations

Jul 5, 2011·The Review of Scientific Instruments·Chun-Lei FengHongbin Ding
May 6, 2011·The Journal of Physical Chemistry. B·Rodney T ChenFrank Caruso
Jul 11, 2020·Statistical Applications in Genetics and Molecular Biology·Samuel E JacksonKeith Lindsey
Aug 14, 2020·Scientific Reports·Rimantas Knizikevičius
Jan 7, 2010·The Journal of Physical Chemistry. a·Michelle M MorganEllen R Fisher

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Methods Mentioned

BETA
Infrared Spectroscopy
X-ray
electron spin resonance

Software Mentioned

OES
TR
CRDS

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