Plasmonic nanostructured metal-oxide-semiconductor reflection modulators

Nano Letters
Anthony OlivieriPierre Berini

Abstract

We propose a plasmonic surface that produces an electrically controlled reflectance as a high-speed intensity modulator. The device is conceived as a metal-oxide-semiconductor capacitor on silicon with its metal structured as a thin patch bearing a contiguous nanoscale grating. The metal structure serves multiple functions as a driving electrode and as a grating coupler for perpendicularly incident p-polarized light to surface plasmons supported by the patch. Modulation is produced by charging and discharging the capacitor and exploiting the carrier refraction effect in silicon along with the high sensitivity of strongly confined surface plasmons to index perturbations. The area of the modulator is set by the area of the incident beam, leading to a very compact device for a strongly focused beam (∼2.5 μm in diameter). Theoretically, the modulator can operate over a broad electrical bandwidth (tens of gigahertz) with a modulation depth of 3 to 6%, a loss of 3 to 4 dB, and an optical bandwidth of about 50 nm. About 1000 modulators can be integrated over a 50 mm(2) area producing an aggregate electro-optic modulation rate in excess of 1 Tb/s. We demonstrate experimentally modulators operating at telecommunications wavelengths, fab...Continue Reading

References

Jun 12, 2008·Optics Express·E PopovG H Derrick
Jan 28, 2009·Nano Letters·Jennifer A DionneHarry A Atwater
Oct 16, 2009·Nano Letters·Wenshan CaiMark L Brongersma
Feb 20, 2010·Nature Materials·Jon A SchullerMark L Brongersma
Feb 23, 2010·Optics Express·Jacek GosciniakAlain Dereux
Jun 7, 2011·Optics Express·A MelikyanJ Leuthold
Oct 10, 2013·Optics Express·M P Nielsen, A Y Elezzabi
Nov 22, 2014·Nanotechnology·Sa'ad HassanPierre Berini

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Citations

Aug 27, 2016·Nano Letters·Yao-Wei HuangHarry A Atwater
Apr 19, 2017·Scientific Reports·Ki Young LeeRobert Magnusson
Jun 15, 2017·Advanced Materials·Krishnan ThyagarajanHarry A Atwater
Nov 4, 2017·Science·Masafumi AyataJuerg Leuthold
May 5, 2017·Optics Express·Christoph A RiedelC H de Groot
Nov 10, 2016·Optics Express·Mohammad AlaviradPierre Berini
Mar 24, 2018·Nano Letters·Ghazaleh Kafaie ShirmaneshHarry A Atwater
Sep 2, 2021·Nano Letters·Melissa LiHarry A Atwater
Feb 22, 2018··Pierre Berini, Pierre Berini
Aug 24, 2017··Pierre Berini, Pierre Berini

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