Polyimide-Based Capacitive Humidity Sensor

Sensors
Jamila BoudadenPeter Müller-Buschbaum

Abstract

The development of humidity sensors with simple transduction principles attracts considerable interest by both scientific researchers and industrial companies. Capacitive humidity sensors, based on polyimide sensing material with different thickness and surface morphologies, are prepared. The surface morphology of the sensing layer is varied from flat to rough and then to nanostructure called nanograss by using an oxygen plasma etch process. The relative humidity (RH) sensor selectively responds to the presence of water vapor by a capacitance change. The interaction between polyimide and water molecules is studied by FTIR spectroscopy. The complete characterization of the prepared capacitive humidity sensor performance is realized using a gas mixing setup and an evaluation kit. A linear correlation is found between the measured capacitance and the RH level in the range of 5 to 85%. The morphology of the humidity sensing layer is revealed as an important parameter influencing the sensor performance. It is proved that a nanograss-like structure is the most effective for detecting RH, due to its rapid response and recovery times, which are comparable to or even better than the ones of commercial polymer-based sensors. This work de...Continue Reading

Citations

Nov 9, 2019·Sensors·Kevin Mc GeeDavid Collins
May 20, 2020·Chemical Society Reviews·Saravanan YuvarajaPrashant Sonar
Dec 20, 2018·Sensors·Shujing SuJijun Xiong
Mar 12, 2020·Scientific Reports·A BanerjeeC H Mastrangelo
Jul 13, 2021·ACS Omega·Richard MurrayAidan J Quinn
Dec 24, 2021·Advanced Science·Hongye YuanDan Zhao

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Methods Mentioned

BETA
chip
chips
infrared spectroscopy
biosensors

Software Mentioned

FEM
COMSOL Multiphysics
COMSOL

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