Post-fabrication trimming of athermal silicon waveguides

Optics Letters
Stefano GrillandaAnu Agarwal

Abstract

We experimentally demonstrate the post-fabrication trimming of polymer-coated athermal silicon waveguides by exploiting the photosensitivity of As(2)S(3) chalcogenide glass to near-bandgap visible light. Our technique enables compensation of fabrication tolerances and modification of specific circuit functionalities after fabrication. Moreover, our athermal and trimmable waveguide technology is highly resilient to high optical power, and thus extremely appealing for nonlinear applications. Finally, it enables to fix the absolute wavelength and spectral response of silicon devices with extremely low dependence from temperature and power.

References

Apr 17, 2008·Optics Letters·Juejun HuLionel Kimerling
Jul 29, 2002·Optics Express·A van PoptaS Kasap
Aug 20, 2010·Optics Express·Vivek RaghunathanLionel Kimerling
Feb 22, 2012·Optics Letters·Lian-Wee LuoMichal Lipson
Jul 10, 2012·Optics Express·Antonio CanciamillaAndrea Melloni
Jan 11, 2013·Nature·Jie SunMichael R Watts

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Citations

Jun 13, 2014·Optics Express·Timo LipkaJörg Müller
Aug 17, 2020·Optics Letters·Stefano GrillandaMark Earnshaw

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