Pushing the limits: an instrument for hard X-ray imaging below 20 nm

Journal of Synchrotron Radiation
E NazaretskiY S Chu

Abstract

Hard X-ray microscopy is a prominent tool suitable for nanoscale-resolution non-destructive imaging of various materials used in different areas of science and technology. With an ongoing effort to push the 2D/3D imaging resolution down to 10 nm in the hard X-ray regime, both the fabrication of nano-focusing optics and the stability of the microscope using those optics become extremely challenging. In this work a microscopy system designed and constructed to accommodate multilayer Laue lenses as nanofocusing optics is presented. The developed apparatus has been thoroughly characterized in terms of resolution and stability followed by imaging experiments at a synchrotron facility. Drift rates of ∼2 nm h(-1) accompanied by 13 nm × 33 nm imaging resolution at 11.8 keV are reported.

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Citations

Jul 16, 2015·Optics Letters·S O HruszkewyczP H Fuoss
Jun 16, 2015·Optics Express·Xiaojing HuangYong S Chu
Sep 5, 2018·Journal of Synchrotron Radiation·Yuan GaoMartin R Fuchs
Jun 23, 2020·Journal of Physics. Condensed Matter : an Institute of Physics Journal·John HillKevin G Yager
Apr 26, 2017·Optics Express·Xiaojing HuangHanfei Yan
Sep 2, 2017·Journal of Synchrotron Radiation·Harald Wallander, Jesper Wallentin
Aug 31, 2018·Scientific Reports·Florence T LingYong S Chu
Sep 9, 2018·Scientific Reports·Tiffany W VictorLisa M Miller
Sep 27, 2018·Advanced Science·Umut Tunca SanliKahraman Keskinbora
Mar 2, 2019·Acta Crystallographica. Section A, Foundations and Advances·Xiaojing HuangYong S Chu
Mar 7, 2019·Light, Science & Applications·Saša BajtChristian E Hamm
Sep 2, 2019·The Review of Scientific Instruments·Junjing DengStefan Vogt
Jun 3, 2017·The Review of Scientific Instruments·Tomaš StankevičStefan Kubsky
Nov 2, 2017·Journal of Synchrotron Radiation·Sangsul LeeJun Lim
Feb 1, 2019·Optics Letters·Xiaojing HuangYong S Chu
May 15, 2021·Optics Express·Satoshi MatsuyamaKazuto Yamauchi
Sep 30, 2021·IUCrJ·Jumpei YamadaMakina Yabashi

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