Quantitative Analysis of the Incorporation Behaviors of Sr and Ti Atoms During the Atomic Layer Deposition of SrTiO3 Thin Films

ACS Applied Materials & Interfaces
Min Jung ChungCheol Seong Hwang

Abstract

The atomic layer deposition (ALD) of multication oxide films is complicated because the deposition behaviors of the component oxides are not independent of one another. In this study, the Ti and Sr atom incorporation behaviors during the ALD of SrTiO3 films were quantitatively examined via the carefully designed ALD process sequences. H2O and O3 were adopted as the oxygen sources of the SrO subcycles, whereas only O3 was used for the TiO2 ALD subcycles. Apart from the general conjecture on the roles of the different types of oxygen sources, the oxygen source that was adopted for the subcycles of the other component oxide had almost complete control of the metal atom incorporation behaviors. This means that the first half-cycle of ALD played a dominant role in determining the metal incorporation rate, which revealed the critical role of the steric hindrance effect during the metal precursor injection for the ALD rate. O3 had almost doubled its reactivity toward the Ti and Sr precursors compared with H2O. Although these are the expected results from the common knowledge on ALD, the quantitative analysis of the incorporation behaviors of each metal atom provided insightful viewpoints for the ALD process of this technically importa...Continue Reading

References

Nov 26, 2003·Angewandte Chemie·Markku Leskelä, Mikko Ritala
Dec 29, 2004·Langmuir : the ACS Journal of Surfaces and Colloids·Wei Gu, Carl P Tripp
Jan 27, 2012·Advanced Materials·Catherine MarichyNicola Pinna
Oct 20, 2015·Nature Communications·Christoph BaeumerRegina Dittmann
Jun 29, 2016·ACS Applied Materials & Interfaces·Matthias J YoungSteven M George

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