Quick pre-correction of a grating fringe for phase measuring profilometry

Applied Optics
Qian HuangJinlong Li

Abstract

In this paper, for a phase measuring profilometry (PMP) system based on a digital light projector, a novel method of grating fringe quick pre-correction is proposed. In the actual engineering conditions, it is impractical to strictly limit the geometry of the system. So grating fringes on the reference plane often appear as distortions of keystone and period broadening, which are difficult to completely eliminate in the traditional calibration process. A pre-correction method based on analytic spatial transform is designed to solve these problems individually. The correction process occurs before the digital micromirror device image is generated, and theoretically, it can be compatible with most existing PMP correction and calibration methods. The correction is simple and completely implicit, and does not require a special calibration target. The correction is quick, only needs to project and shoot a fringe pattern and a corner pattern, and can be completed within a few seconds. A simulation and several experiments were carried out to verify the effectiveness of this method.

References

May 18, 2004·Applied Optics·Hongwei GuoMingyi Chen
Sep 15, 1984·Applied Optics·V SrinivasanM Halioua
Nov 24, 2011·Optics Express·Yanjun Fu, Qian Luo
Mar 14, 2012·Applied Optics·Yanshan XiaoYingchun Wu
Jan 22, 2015·Applied Optics·Beiwen Li, Song Zhang

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