Radiation impedance study of a capacitive micromachined ultrasonic transducer by finite element analysis

The Journal of the Acoustical Society of America
Baris Bayram

Abstract

In this study, radiation impedance of a capacitive micromachined ultrasonic transducer composed of square-shaped membranes arranged in m × m configuration (m = 1 - 5) is investigated using finite element analysis (FEA) of a commercially available software package(ANSYS). Radiation impedance is calculated for immersed membranes operating in conventional and collapse modes. Individual membrane response within the multi-membrane configuration is analyzed, and excited modes and their effects on radiation impedance and the pressure spectra are reported. This FEA provides an accurate behavior of the acoustic coupling of a thin membrane in a multi-membrane configuration, and extends above the anti-resonance frequency. The first resonance frequency of the membrane is excited for m × m (m ≥ 3) configuration in conventional mode and for m × m (m ≥ 2) configuration in collapse mode. Therefore, this frequency is determined to be responsible for the adverse effects observed in radiation impedance and pressure spectrum. A membrane configuration, which is missing the central membrane from the full m × m configuration is proposed, and is investigated with the FEA. This study is beneficial for the design of precise transducers suited for biomed...Continue Reading

References

Oct 17, 2003·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Baris BayramButrus T Khuri-Yakub
Apr 2, 2005·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Baris BayramButrus T Khuri-Yakub
Feb 9, 2006·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Alessandro CarontiMassimo Pappalardo
Feb 9, 2006·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Ihsan CiçekMustafa Karaman
Feb 9, 2006·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Baris BayramButrus T Khuri-Yakub
Mar 3, 2007·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Baris BayramButrus T Khuri-Yakub
Nov 7, 2008·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Ayhan Bozkurt
Apr 10, 2010·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Muhammed N SenlikAbdullah Atalar
Nov 30, 2010·The Journal of the Acoustical Society of America·Cyril MeynierDominique Certon
Aug 24, 2011·Journal of Micromechanics and Microengineering : Structures, Devices, and Systems·Butrus T Khuri-Yakub, Omer Oralkan
Jun 22, 2012·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Alper OzgurlukSelim Olçum
Jan 30, 2013·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Ahmet M Cetin, Baris Bayram

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Citations

Aug 23, 2020·Materials·Stefano SalvatoriVictor Ralchenko
Nov 9, 2018·The Journal of the Acoustical Society of America·Eunghwy NohHongwoo Yoon

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