Rapid fabrication of solid-state nanopores with high reproducibility over a large area using a helium ion microscope

Nanoscale
Deying XiaXinsheng Sean Ling

Abstract

The fabrication of solid-state nanopores in an insulating membrane has attracted much attention for biomolecule analysis such as DNA sequencing and detection in recent years. For practical applications and device integration, the challenges include precise size control for sub 10 nm nanopores, excellent repeatability and rapid fabrication over a large area to reduce the cost for mass production. A helium ion beam could provide an effective fabrication approach to produce such solid-state nanopores. It is easy to control the nanopore size and reach sub 10 nm pore size with a simple change in the milling time with an appropriate ion beam current. Here we report new results in a set of experiments demonstrating that with a small range of stage automatized motions and equal mill times one can obtain good fabrication reproducibility in nanopore sizes (<10% variation in size). The automation in the stage motion and milling time opens a door for the rapid mass production of nanopore chips over a wafer size of several inches.

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Citations

Apr 4, 2019·Advanced Materials·Joshua D SpitzbergAmit Meller
Sep 5, 2020·Nanotechnology·Deying XiaDoug Runt
Jan 3, 2020·The Review of Scientific Instruments·T St-DenisW Reisner
Apr 17, 2020·Nanoscale Research Letters·Zhishan YuanChengyong Wang
Dec 10, 2020·Essays in Biochemistry·Sonja Schmid, Cees Dekker
Feb 25, 2021·Chemical Society Reviews·Jasper P FriedJames R Yates

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Methods Mentioned

BETA
biosensor
chips
chip

Software Mentioned

Zeiss NanoFab

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