Rapid large-scale fabrication of multipart unit cell metasurfaces

Optics Express
Hafez HemmatiRobert Magnusson

Abstract

Periodic diffractive elements known as metasurfaces constitute platform technology whereby exceptional optical properties, not attainable by conventional means, are attained. Generally, with increasing unit-cell complexity, there emerges a wider design space and bolstered functional capability. Advanced devices deploying elaborate unit cells are typically generated by electron-beam patterning which is a tedious, slow process not suitable for large surfaces and quick turnaround. Ameliorating this condition, we present a novel route towards facile fabrication of complex periodic metasurfaces based on sequential exposures by laser interference lithography. Our method is fast, cost-effective, and can be applied to large surface areas. It is enabled by precise control over periodicity and exposure energy. With it we have successfully patterned and fabricated one-dimensional (1D) and two-dimensional (2D) multipart unit cell devices as demonstrated here. Thus, zero-order transmission spectra of an etched four-part 1D grating device are simulated and measured for both transverse-electric (TE) and transverse-magnetic (TM) polarization states of normally incident light. We confirm non-resonant wideband antireflection (∼800 nm) for TM-pol...Continue Reading

References

Jun 11, 2008·Optics Express·Robert Magnusson, Mehrdad Shokooh-Saremi
Nov 15, 2004·Optics Express·Y Ding, R Magnusson
Oct 27, 2010·Advanced Materials·Deying XiaS R J Brueck
Apr 23, 2014·Journal of Nanoscience and Nanotechnology·Jung-Hun SeoByeong-Kwon Ju
Jan 8, 2016·Nature Nanotechnology·Saman Jahani, Zubin Jacob
Jan 7, 2017·Optics Letters·Soo Jin Kim, Mark L Brongersma
May 26, 2017·Scientific Reports·Dianmin LinMichael Klug
Mar 16, 2019·ACS Applied Materials & Interfaces·Swagato SarkarTobias A F König

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Citations

May 1, 2021·Optics Letters·Md Ataul MamunVitaliy Avrutin

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