Real-time enhancement of defects in periodic patterns by use of a bacteriorhodopsin film

Optics Letters
T OkamotoK Yamagata

Abstract

We present a real-time optical system to enhance defects in periodic patterns by use of nonlinear spatial filtering by real-time holography. A straight and equispaced grating written in a bacteriorhodopsin film is read by the Fourier transform of a periodic pattern to be inspected. Because the diffraction efficiency of the grating depends on the intensity of the reading beam, only the defect component can be selectively diffracted and imaged. This system is applicable even to moving objects. We present experimental results that show enhancement of defects as small as 10 microm in a photomask with a pixel pitch of 150 microm used for a liquid-crystal display.

Citations

May 7, 2008·Optics Communications·Chandra S YelleswarapuD V G L N Rao
Aug 18, 2000·Photochemistry and Photobiology·O Barmenkov YuH Lemmetyinen
Jun 3, 2005·Applied Optics·Eugenio GarbusiCésar D Perciante
Jan 25, 2005·Applied Optics·José A FerrariGustavo Píriz
Sep 11, 2004·Optics Letters·Yuhua HuangShin-Tson Wu

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