Review Article: Progress in fabrication of transition metal dichalcogenides heterostructure systems

Journal of Vacuum Science and Technology. B, Nanotechnology & Microelectronics : Materials, Processing, Measurement, & Phenomena : JVST B
Rui Dong, Irma Kuljanishvili

Abstract

Transition metal dichalcogenide (TMDC) semiconductors have attracted significant attention because of their rich electronic/photonic properties and importance for fundamental research and novel device applications. These materials provide a unique opportunity to build up high quality and atomically sharp heterostructures because of the nature of weak van der Waals interlayer interactions. The variable electronic properties of TMDCs (e.g., band gap and their alignment) provide a platform for the design of novel electronic and optoelectronic devices. The integration of TMDC heterostructures into the semiconductor industry is presently hindered by limited options in reliable production methods. Many exciting properties and device architectures which have been studied to date are, in large, based on the exfoliation methods of bulk TMDC crystals. These methods are generally more difficult to consider for large scale integration processes, and hence, continued developments of different fabrication strategies are essential for further advancements in this area. In this review, the authors highlight the recent progress in the fabrication of TMDC heterostructures. The authors will review several methods most commonly used to date for co...Continue Reading

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Jan 16, 2021·Optics Letters·Manoel L Silva-NetoAnderson S L Gomes
May 26, 2021·Advanced Materials·Yu LiMinghua Chen
Nov 8, 2018·Nano Letters·Nan ZhangPaulina Plochocka
Oct 29, 2020·ACS Nano·Joseph R NasrSaptarshi Das

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Methods Mentioned

BETA
optical microscopy
Atomic force microscopy
chemical vapor deposition
thermal treatment
optical
scanning electron microscopy
Electron diffraction
AFM
transmission electron microscopy
electron-beam photolithography

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