Role of hydrogen in the chemical vapor deposition growth of MoS2 atomic layers

Nanoscale
Xiao LiHongwei Zhu

Abstract

Hydrogen plays a crucial role in the chemical vapor deposition (CVD) growth of graphene. Here, we have revealed the roles of hydrogen in the two-step CVD growth of MoS2. Our study demonstrates that hydrogen acts as the following: (i) an inhibitor of the thermal-induced etching effect in the continuous film growth process; and (ii) a promoter of the desulfurization reaction by decreasing the S/Mo atomic ratio and the oxidation reaction of the obtained MoSx (0 < x < 2) films. A high hydrogen content of more than 100% in argon forms nano-sized circle-like defects and damages the continuity and uniformity of the film. Continuous MoS2 films with a high crystallinity and a nearly perfect S/Mo atomic ratio were finally obtained after sulfurization annealing with a hydrogen content in the range of 20%-80%. This insightful understanding reveals the crucial roles of hydrogen in the CVD growth of MoS2 and paves the way for the controllable synthesis of two-dimensional materials.

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Citations

Dec 9, 2017·Journal of Physics. Condensed Matter : an Institute of Physics Journal·Fábio FerreiraRicardo Ribeiro
Dec 10, 2015·Journal of Physics. Condensed Matter : an Institute of Physics Journal·V PankratovW Cao
Aug 31, 2018·Physical Chemistry Chemical Physics : PCCP·Soohyun ChoSeung Ryong Park
Nov 23, 2019·Nanomaterials·Hyeon-Sik JangDongmok Whang
Apr 23, 2020·Molecules : a Journal of Synthetic Chemistry and Natural Product Chemistry·Tao HanKun Yang
Dec 20, 2017·Journal of Physics. Condensed Matter : an Institute of Physics Journal·F FerreiraR M Ribeiro
Jul 4, 2020·ACS Applied Materials & Interfaces·Yunjeong HwangNaechul Shin
Sep 4, 2019·ACS Applied Materials & Interfaces·Binjie HuangJohn T L Thong
Jun 15, 2019·ACS Applied Materials & Interfaces·Binjie HuangJohn T L Thong

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