Scalable Fourier transform system for instantly structured illumination in lithography

Optics Letters
Yan YeZhiwei Huang

Abstract

We report the development of a unique scalable Fourier transform 4-f system for instantly structured illumination in lithography. In the 4-f system, coupled with a 1-D grating and a phase retarder, the ±1st order of diffracted light from the grating serve as coherent incident sources for creating interference patterns on the image plane. By adjusting the grating and the phase retarder, the interference fringes with consecutive frequencies, as well as their orientations and phase shifts, can be generated instantly within a constant interference area. We demonstrate that by adapting this scalable Fourier transform system into lithography, the pixelated nano-fringe arrays with arbitrary frequencies and orientations can be dynamically produced in the photoresist with high variation resolution, suggesting its promising application for large-area functional materials based on space-variant nanostructures in lithography.

References

Jan 29, 2005·Optics Letters·Enbang LiJoe Chicharo
Oct 27, 2010·Advanced Materials·Deying XiaS R J Brueck
May 5, 2011·Optics Letters·Ishan WathuthanthriChang-Hwan Choi
Aug 19, 2011·Optics Letters·Weidong MaoChang-Hwan Choi
Oct 18, 2011·Nature Methods·Lin ShaoMats G L Gustafsson
Mar 16, 2013·Science·Alexander V KildishevVladimir M Shalaev
Jul 19, 2014·Science·Dianmin LinMark L Brongersma
Sep 30, 2014·Scientific Reports·Jun ZhengJie Zhang

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