Scanning electron microscopy imaging of dislocations in bulk materials, using electron channeling contrast

Microscopy Research and Technique
Martin A Crimp

Abstract

The imaging and characterization of dislocations is commonly carried out by thin foil transmission electron microscopy (TEM) using diffraction contrast imaging. However, the thin foil approach is limited by difficult sample preparation, thin foil artifacts, relatively small viewable areas, and constraints on carrying out in situ studies. Electron channeling imaging of electron channeling contrast imaging (ECCI) offers an alternative approach for imaging crystalline defects, including dislocations. Because ECCI is carried out with field emission gun scanning electron microscope (FEG-SEM) using bulk specimens, many of the limitations of TEM thin foil analysis are overcome. This paper outlines the development of electron channeling patterns and channeling imaging to the current state of the art. The experimental parameters and set up necessary to carry out routine channeling imaging are reviewed. A number of examples that illustrate some of the advantages of ECCI over thin foil TEM are presented along with a discussion of some of the limitations on carrying out channeling contrast analysis of defect structures.

References

Aug 6, 2000·Acta Crystallographica. Section A, Foundations of Crystallography·S L DudarevA J Wilkinson

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Citations

Oct 15, 2013·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Shirin KaboliRaynald Gauvin
Jul 3, 2010·Journal of Electron Microscopy·Noriyuki KuwanoShigeaki Tachibana
Sep 3, 2011·Journal of Microscopy·Ranga J KamaladasaYoosuf N Picard
Dec 2, 2014·Ultramicroscopy·J GuyonN Maloufi
Aug 14, 2020·Ultramicroscopy·Chaoyi Zhu, Marc De Graef
Dec 22, 2019·Ultramicroscopy·R D KernsM A Crimp

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