Schottky Barrier Height Engineering for Electrical Contacts of Multilayered MoS2 Transistors with Reduction of Metal-Induced Gap States

ACS Nano
Gwang-Sik KimHyun-Yong Yu

Abstract

The difficulty in Schottky barrier height (SBH) control arising from Fermi-level pinning (FLP) at electrical contacts is a bottleneck in designing high-performance nanoscale electronics and optoelectronics based on molybdenum disulfide (MoS2). For electrical contacts of multilayered MoS2, the Fermi level on the metal side is strongly pinned near the conduction-band edge of MoS2, which makes most MoS2-channel field-effect transistors (MoS2 FETs) exhibit n-type transfer characteristics regardless of their source/drain (S/D) contact metals. In this work, SBH engineering is conducted to control the SBH of electrical top contacts of multilayered MoS2 by introducing a metal-interlayer-semiconductor (MIS) structure which induces the Fermi-level unpinning by a reduction of metal-induced gap states (MIGS). An ultrathin titanium dioxide (TiO2) interlayer is inserted between the metal contact and the multilayered MoS2 to alleviate FLP and tune the SBH at the S/D contacts of multilayered MoS2 FETs. A significant alleviation of FLP is demonstrated as MIS structures with 1 nm thick TiO2 interlayers are introduced into the S/D contacts. Consequently, the pinning factor ( S) increases from 0.02 for metal-semiconductor (MS) contacts to 0.24 for...Continue Reading

References

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Sep 28, 2017·ACS Applied Materials & Interfaces·Gwang-Sik KimHyun-Yong Yu

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Citations

Mar 5, 2020·Nanoscale Horizons : the Home for Rapid Reports of Exceptional Significance in Nanoscience and Nanotechnolgy·Wugang LiaoHan Zhang
Feb 9, 2020·Materials·Keren M Freedy, Stephen J McDonnell
Jan 1, 2019·Applied Physics Letters·Siyuan ZhangChristina A Hacker
Feb 6, 2021·ACS Applied Materials & Interfaces·Jinho LimSeunghyun Lee
Jan 1, 2020·ACS Applied Materials & Interfaces·Jisu JangSun Jin Yun
Mar 16, 2019·The Journal of Physical Chemistry. C, Nanomaterials and Interfaces·Kai SotthewesPantelis Bampoulis
Aug 21, 2019·ACS Applied Materials & Interfaces·Seung-Hwan KimHyun-Yong Yu
Oct 9, 2019·ACS Applied Materials & Interfaces·Youngjun KimHyungjun Kim
Jan 22, 2019·ACS Applied Materials & Interfaces·Seung-Hwan KimHyun-Yong Yu
Sep 4, 2019·ACS Applied Materials & Interfaces·Jun LiuThomas Thundat
Oct 15, 2021·Nanotechnology·Junhao NiShaoqing Xiao

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