Selection Role of Metal Oxides into Transition Metal Dichalcogenide Monolayers by a Direct Selenization Process

ACS Applied Materials & Interfaces
Wei-Sheng LinYu-Lun Chueh

Abstract

Direct reduction of metal oxides into a few transition metal dichalcogenide (TMDCs) monolayers has been recently explored as an alternative method for large area and uniform deposition. However, not many studies have addressed the characteristics and requirement of the metal oxides into TMDCs by the selenization/sulfurization processes, yielding a wide range of outstanding properties to poor electrical characteristics with nonuniform films. The large difference implies that the process is yet not fully understood. In particular, the selenization/sulfurization at low temperature leads to poor crystallinity films with poor electrical performance, hindering its practical development. A common approach to improve the quality of the selenized/sulfurized films is by further increasing the process temperature, thus requiring additional transfer in order to explore the electrical properties. Here, we show that by finely tuning the quality of the predeposited oxide the selenization/sulfurization temperature can be largely decreased, avoiding major substrate damage and allowing direct device fabrication. The direct relationship between the role of selecting different metal oxides prepared by e-beam evaporation and reactive sputtering and...Continue Reading

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Citations

Aug 15, 2019·Dalton Transactions : an International Journal of Inorganic Chemistry·C K Sumesh, Sebastian C Peter
Jul 1, 2020·Reviews on Environmental Health·Guoqing ZhaoFeipeng Jiao

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