Shearing interferometer using the grating as the beam splitter

Applied Optics
S Yokozeki, T Suzuki

Abstract

The theoretical interpretation of the shearing interferometer based on the moiré method using the fourier image of the grating is described. To obtain a pattern with good contrast, the observing plane must coincide with the normal fourier image plane of the grating or with the reversed fourier image plane. The information obtained by this method is the first partial derivative and under certain conditions the second partial derivative of the distortion from the reference wavefront, which is planar or spherical. Applications to measurement of the phase gradient and lens aberration are shown.

References


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Citations

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