Si quantum dots embedded in an amorphous SiC matrix: nanophase control by non-equilibrium plasma hydrogenation

Nanoscale
Qijin ChengK Ostrikov

Abstract

Nanophase nc-Si/a-SiC films that contain Si quantum dots (QDs) embedded in an amorphous SiC matrix were deposited on single-crystal silicon substrates using inductively coupled plasma-assisted chemical vapor deposition from the reactive silane and methane precursor gases diluted with hydrogen at a substrate temperature of 200 degrees C. The effect of the hydrogen dilution ratio X (X is defined as the flow rate ratio of hydrogen-to-silane plus methane gases), ranging from 0 to 10.0, on the morphological, structural, and compositional properties of the deposited films, is extensively and systematically studied by scanning electron microscopy, high-resolution transmission electron microscopy, X-ray diffraction, Raman spectroscopy, Fourier-transform infrared absorption spectroscopy, and X-ray photoelectron spectroscopy. Effective nanophase segregation at a low hydrogen dilution ratio of 4.0 leads to the formation of highly uniform Si QDs embedded in the amorphous SiC matrix. It is also shown that with the increase of X, the crystallinity degree and the crystallite size increase while the carbon content and the growth rate decrease. The obtained experimental results are explained in terms of the effect of hydrogen dilution on the nu...Continue Reading

References

Oct 3, 2000·Nature·G F GromL Tsybeskov
Oct 13, 2000·Science·V I KlimovM G Bawendi
Oct 25, 2000·Physical Review. E, Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics·K N OstrikovL Stenflo
Jul 5, 2002·Nature·Saravanapriyan SriramanDimitrios Maroudas
Jul 21, 2010·Nanoscale·Rita E SerdaMauro Ferrari

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Citations

Feb 15, 2013·Physical Chemistry Chemical Physics : PCCP·Basudeb Sain, Debajyoti Das
Mar 13, 2012·Chemphyschem : a European Journal of Chemical Physics and Physical Chemistry·Qijin Cheng, Kostya Ken Ostrikov
Nov 17, 2010·Nanoscale·Yuping RenKostya Ken Ostrikov
May 27, 2016·Physical Chemistry Chemical Physics : PCCP·Bibhuti Bhusan SahuMasaharu Shiratani
Oct 7, 2016·Physical Chemistry Chemical Physics : PCCP·Bibhuti Bhusan SahuHolger Kersten
Jan 22, 2013·Nanoscale·Davide MariottiVladimir Svrček
Nov 17, 2016·Physical Chemistry Chemical Physics : PCCP·Jun Suk LeeJeon Geon Han

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