Silica coating of polymer nanowires produced via nanoimprint lithography from femtosecond laser machined templates

Nanotechnology
D RajputWilliam Hofmeister

Abstract

In this paper we report on the fabrication of regular arrays of silica nanoneedles by deposition of a thin layer of silica on patterned arrays of polymer nanowires (or polymer nanohair). An array of high-aspect-ratio nanoscale diameter holes of depths greater than 10 µm was produced at the surface of a fused silica wafer by an amplified femtosecond laser system operated in single-pulse mode. Cellulose acetate (CA) film was imprinted into the nanoholes and peeled off to form a patterned array of standing CA nanowires, a negative replica of the laser machined nanoholes. The cellulose acetate replica was then coated with silica in a chemical vapor deposition process using silicon tetrachloride vapor at 65 °C. Field emission scanning electron microscopy, focused ion beam sectioning, energy dispersive x-ray analysis and Fourier-transform infrared spectroscopy were used to characterize the silica nanoneedles. Precisely patterned, functionalized arrays of standing silica nanoneedles are useful for a number of applications.

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Citations

Dec 19, 2012·ACS Applied Materials & Interfaces·D RajputW Hofmeister
Sep 26, 2012·Colloids and Surfaces. B, Biointerfaces·Deepak RajputWilliam Hofmeister
Sep 25, 2015·Journal of Inorganic Biochemistry·Imalka MunaweeraKenneth J Balkus
Apr 4, 2015·Journal of the Mechanical Behavior of Biomedical Materials·M Morales-HurtadoE van der Heide
Apr 17, 2015·Journal of Biomedical Optics·Andrea Ceja-FdezElder de la Rosa
Feb 23, 2020·Environmental Science and Pollution Research International·Rand ElshorafaSaid Ahzi
Aug 12, 2016·ACS Applied Materials & Interfaces·Virginia PensabeneWilliam H Hofmeister

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