Simple and reliable direct patterning method for carbon-free solution-processed metal oxide TFTs

Scientific Reports
Masashi MiyakawaYoshihide Fujisaki

Abstract

Metal oxide TFT fabrication based on a solution-processing method is considered a promising alternative to conventional vacuum processing and has a number of advantages such as low cost, large-area fabrication, and process simplicity. A simple and reliable, direct patterning method for obtaining a carbon-free aqueous metal oxide film is presented herein. Patterning, which is achieved by selective photoreaction of water molecules under ultraviolet irradiation and by a safe, environment-friendly chemical etching process using a non-toxic organic acid, is followed by an annealing process at a temperature of 350 °C to obtain carbon-free metal oxide TFTs. In-Ga-Zn oxide (IGZO), TFTs on SiO2 dielectrics that were fabricated with a direct patterning method exhibited an average mobility of 4.3 cm2/V·s with good uniformity, which is comparable to TFTs formed by conventional photolithography. The TFTs exhibited stable performance with small (within 0.5 V) shifts in switch-on voltage under positive and negative bias stress. Fabrication of flexible IGZO TFTs by direct patterning was also achieved.

References

Aug 29, 2003·Journal of the Air & Waste Management Association·HungMin Chein, Tzu Ming Chen
Jul 22, 2011·Nature·Jonathan M RothbergJames Bustillo
May 11, 2012·Advanced Materials·E FortunatoR Martins
Jun 19, 2013·Chemical Society Reviews·Stuart R ThomasThomas D Anthopoulos
Jan 28, 2014·Water Research·Kristin ZoschkeEckhard Worch
Sep 10, 2010·Science and Technology of Advanced Materials·Toshio KamiyaHideo Hosono

❮ Previous
Next ❯

Citations

Apr 12, 2019·Nanotechnology·Rongsheng Chen, Linfeng Lan
Feb 25, 2020·Chemistry : a European Journal·Jeong-Wan JoSung Kyu Park

❮ Previous
Next ❯

Methods Mentioned

BETA
optical
Optical microscopy
X-ray
thermal desorption spectroscopy
infrared spectroscopy
profiler

Related Concepts

Trending Feeds

COVID-19

Coronaviruses encompass a large family of viruses that cause the common cold as well as more serious diseases, such as the ongoing outbreak of coronavirus disease 2019 (COVID-19; formally known as 2019-nCoV). Coronaviruses can spread from animals to humans; symptoms include fever, cough, shortness of breath, and breathing difficulties; in more severe cases, infection can lead to death. This feed covers recent research on COVID-19.

Blastomycosis

Blastomycosis fungal infections spread through inhaling Blastomyces dermatitidis spores. Discover the latest research on blastomycosis fungal infections here.

Nuclear Pore Complex in ALS/FTD

Alterations in nucleocytoplasmic transport, controlled by the nuclear pore complex, may be involved in the pathomechanism underlying multiple neurodegenerative diseases including Amyotrophic Lateral Sclerosis and Frontotemporal Dementia. Here is the latest research on the nuclear pore complex in ALS and FTD.

Applications of Molecular Barcoding

The concept of molecular barcoding is that each original DNA or RNA molecule is attached to a unique sequence barcode. Sequence reads having different barcodes represent different original molecules, while sequence reads having the same barcode are results of PCR duplication from one original molecule. Discover the latest research on molecular barcoding here.

Chronic Fatigue Syndrome

Chronic fatigue syndrome is a disease characterized by unexplained disabling fatigue; the pathology of which is incompletely understood. Discover the latest research on chronic fatigue syndrome here.

Evolution of Pluripotency

Pluripotency refers to the ability of a cell to develop into three primary germ cell layers of the embryo. This feed focuses on the mechanisms that underlie the evolution of pluripotency. Here is the latest research.

Position Effect Variegation

Position Effect Variagation occurs when a gene is inactivated due to its positioning near heterochromatic regions within a chromosome. Discover the latest research on Position Effect Variagation here.

STING Receptor Agonists

Stimulator of IFN genes (STING) are a group of transmembrane proteins that are involved in the induction of type I interferon that is important in the innate immune response. The stimulation of STING has been an active area of research in the treatment of cancer and infectious diseases. Here is the latest research on STING receptor agonists.

Microbicide

Microbicides are products that can be applied to vaginal or rectal mucosal surfaces with the goal of preventing, or at least significantly reducing, the transmission of sexually transmitted infections. Here is the latest research on microbicides.