Simple photografting method to chemically modify and micropattern the surface of SU-8 photoresist

Langmuir : the ACS Journal of Surfaces and Colloids
Yuli WangNancy L Allbritton

Abstract

SU-8 has gained widespread acceptance as a negative photoresist. It is also finding increasing use as a structural material in microanalytical devices. Consequently, methods to tailor the surface properties of SU-8 as well as to micropattern coatings on the surface of SU-8 are needed. The SU-8 photoresist consists of EPON SU-8 resin mixed with the photoacid generator triarylsulfonium hexafluoroantimonate. This photoacid generator can also serve as a photoinitiator generating free radicals when illuminated with UV light. Under the appropriate conditions, sufficient triarylsulfonium hexafluoroantimonate remains within cured SU-8 to act as a source of free radicals and initiate UV-mediated grafting of polymers onto the surface of the SU-8. UV-mediated grafting was used to coat SU-8 surfaces with poly(acrylic acid) and other water-soluble monomers. The SU-8 surface was chemically micropatterned by placing a mask between the UV light and SU-8. The X-Y spatial resolution of micropatterned poly(acrylic acid) on the SU-8 surface was 2 mum. Three applications of these chemically modified SU-8 surfaces were demonstrated. In the first, poly(ethylene glycol) was used to protect the SU-8 from interactions with proteins, yielding a surface r...Continue Reading

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Citations

Apr 29, 2010·Analytical and Bioanalytical Chemistry·Wei XuNancy L Allbritton
Apr 9, 2013·Colloids and Surfaces. B, Biointerfaces·Silvia MarchesanPatrick G Hartley
Oct 24, 2007·Analytical Chemistry·Jeng-Hao PaiNancy L Allbritton
Jan 17, 2012·Lab on a Chip·Tilak JainEnrique Saez
Mar 13, 2008·Tissue Engineering. Part a·James J NormanTejal A Desai
Mar 7, 2014·Langmuir : the ACS Journal of Surfaces and Colloids·Peng XueYuejun Kang
Apr 2, 2010·Microfluidics and Nanofluidics·Ieong Wong, Chih-Ming Ho
Apr 22, 2015·Nanoscale·Kai Sandvold BeckwithPawel Sikorski
Mar 19, 2014·Analytical Chemistry·Nyoté J Oliver-CalixteSteven A Soper
Jun 7, 2013·Journal of Materials Chemistry. B, Materials for Biology and Medicine·Francisco J OrtegaRosa Puchades
Feb 16, 2008·Langmuir : the ACS Journal of Surfaces and Colloids·Sarah L TaoTejal A Desai
Aug 20, 2008·Langmuir : the ACS Journal of Surfaces and Colloids·Gabriela BlagoiMogens Havsteen Jakobsen
Jun 29, 2021·Langmuir : the ACS Journal of Surfaces and Colloids·Sachin BabuJeong-Bong Lee
Aug 7, 2021·Micromachines·Ziyu Chen, Jeong-Bong Lee
Aug 10, 2019·Langmuir : the ACS Journal of Surfaces and Colloids·Qiaofei PanWenwen Liu
Aug 8, 2014·Langmuir : the ACS Journal of Surfaces and Colloids·Venkataraman V NagaiyanallurNicholas D Spencer

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