Single atom devices by ion implantation

Journal of Physics. Condensed Matter : an Institute of Physics Journal
Jessica van DonkelaarD N Jamieson

Abstract

To expand the capabilities of semiconductor devices for new functions exploiting the quantum states of single donors or other impurity atoms requires a deterministic fabrication method. Ion implantation is a standard tool of the semiconductor industry and we have developed pathways to deterministic ion implantation to address this challenge. Although ion straggling limits the precision with which atoms can be positioned, for single atom devices it is possible to use post-implantation techniques to locate favourably placed atoms in devices for control and readout. However, large-scale devices will require improved precision. We examine here how the method of ion beam induced charge, already demonstrated for the deterministic ion implantation of 14 keV P donor atoms in silicon, can be used to implant a non-Poisson distribution of ions in silicon. Further, we demonstrate the method can be developed to higher precision by the incorporation of new deterministic ion implantation strategies that employ on-chip detectors with internal charge gain. In a silicon device we show a pulse height spectrum for 14 keV P ion impact that shows an internal gain of 3 that has the potential of allowing deterministic implantation of sub-14 keV P ions...Continue Reading

References

Oct 9, 2002·Nature·C KurtsieferJ G Rarity
Sep 4, 2003·Philosophical Transactions. Series A, Mathematical, Physical, and Engineering Sciences·Jonathan P Dowling, Gerard J Milburn
Oct 4, 2003·Physical Review Letters·S R SchofieldR G Clark
Jul 13, 2004·Physical Review Letters·H O FunstenR E Johnson
Jun 10, 2005·Nano Letters·A PersaudI W Rangelow
Oct 21, 2005·Nature·Takahiro ShinadaIwao Ohdomari
Mar 16, 2007·Physical Review Letters·Tobias Schmitt-ManderbachHarald Weinfurter
Mar 18, 2009·Physical Chemistry Chemical Physics : PCCP·P NachtigallC O Areán
Aug 9, 2004·Optics Express·A PoppeA Zeilinger
Jan 27, 2010·Nanotechnology·E BielejecM S Carroll
Aug 12, 2010·Nano Letters·David M ToyliDavid D Awschalom
Sep 30, 2010·Nature·Andrea MorelloAndrew S Dzurak
Jul 4, 2012·Nature Nanotechnology·Enrico PratiTakahiro Shinada
Sep 21, 2012·Nature·Jarryd J PlaAndrea Morello
Apr 20, 2013·Nature·Jarryd J PlaAndrea Morello
May 3, 2013·Nature·Chunming YinSven Rogge
Oct 13, 2014·Nature Nanotechnology·Juha T MuhonenAndrea Morello

❮ Previous
Next ❯

Citations

Nov 17, 2015·Nature Nanotechnology·Juan P DehollainAndrea Morello
Nov 1, 2016·Nature Nanotechnology·Arne LauchtA Morello
Apr 27, 2017·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Tomas L MartinMichael P Moody
Jan 1, 2018·The Review of Scientific Instruments·J L PachecoE Bielejec
Oct 26, 2018·Faraday Discussions·Wataru HirayaTsuyoshi Hasegawa
Mar 19, 2015·Journal of Physics. Condensed Matter : an Institute of Physics Journal·Steven R Schofield, Sven Rogge
Sep 20, 2016·Nanotechnology·Travis S HumbleBobby G Sumpter
Jun 30, 2018·Scientific Reports·Paul RäckeJan Meijer
Dec 11, 2019·Nature Nanotechnology·Bas HensenAndrew S Dzurak
Oct 4, 2017·Journal of Physics. Condensed Matter : an Institute of Physics Journal·Željko PastuovićTakeshi Ohshima
Oct 2, 2019·Physical Review Letters·Karin Groot-BerningFerdinand Schmidt-Kaler
Feb 13, 2016·Journal of Physics. Condensed Matter : an Institute of Physics Journal·Xavier JehlMarc Sanquer
Sep 8, 2017·Nature Communications·Guilherme TosiAndrea Morello
Oct 9, 2020·Nature Communications·Johannes E FröchMilos Toth
Feb 6, 2020·ACS Applied Materials & Interfaces·Oğuz YıldırımAlina M Deac

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