Single-shot deflectometry for dynamic 3D surface profile measurement by modified spatial-carrier frequency phase-shifting method

Scientific Reports
Manh The NguyenHyug-Gyo Rhee

Abstract

We propose a new concept of single-shot deflectometry for real-time measurement of three-dimensional surface profile using a single composite pattern. To retrieve an accurate phase from one-frame composite pattern, we adapt the Fourier Transform (FT) method and the spatial carrier-frequency phase-shifting (SCPS) technique to our proposed deflectometry. Based on Lissajous figure and ellipse fitting method, we also correct the phase extraction error in SCPS technique by reducing the effect of background and modulation variations. The proposed technique is verified by comparing our measurement results with phase-shifting deflectometry, and the maximum difference between two measurement results is less than 30 nm rms. We also test the robustness to vibration and the measurement capability for dynamic object.

References

Oct 8, 2005·Optics Letters·Jingang Zhong, Jiawen Weng
May 15, 1986·Applied Optics·D J BoneR J Sandeman
Oct 11, 2008·Applied Optics·Qian KemaoWenjing Gao
Oct 11, 2008·Applied Optics·Jiancheng XuHansheng Peng
Sep 24, 2016·Applied Optics·Zhichao Dong, Haobo Cheng
Dec 3, 2016·Optics Express·Isaac TrumperDae Wook Kim

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