Single-shot ultrafast laser processing of high-aspect-ratio nanochannels using elliptical Bessel beams

Optics Letters
R MeyerF Courvoisier

Abstract

Ultrafast lasers have revolutionized material processing, opening a wealth of new applications in many areas of science. A recent technology that allows the cleaving of transparent materials via non-ablative processes is based on focusing and translating a high-intensity laser beam within a material to induce a well-defined internal stress plane. This then enables material separation without debris generation. Here, we use a non-diffracting beam engineered to have a transverse elliptical spatial profile to generate high-aspect-ratio elliptical channels in glass of a dimension 350  nm×710  nm and subsequent cleaved surface uniformity at the sub-micron level.

References

Oct 26, 2002·Physical Review Letters·L SudrieA Mysyrowicz
Oct 16, 2015·Optics Letters·Adam R Collins, Gerard M O'Connor
Dec 14, 2016·Optics Express·Juozas DudutisGediminas RaČiukaitis

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Citations

Feb 7, 2018·Optics Express·Juozas DudutisPaulius Gečys
Aug 18, 2018·Applied Optics·Klaus BergnerAndreas Tünnerman
Jun 30, 2018·Optics Letters·Michael JenneStefan Nolte
Feb 7, 2018·Optics Express·Klaus BergnerStefan Nolte
Apr 1, 2020·Optics Express·Michael JenneStefan Nolte

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