Single-step deposition of high-mobility graphene at reduced temperatures

Nature Communications
D A BoydN-C Yeh

Abstract

Current methods of chemical vapour deposition (CVD) of graphene on copper are complicated by multiple processing steps and by high temperatures required in both preparing the copper and inducing subsequent film growth. Here we demonstrate a plasma-enhanced CVD chemistry that enables the entire process to take place in a single step, at reduced temperatures (<420 °C), and in a matter of minutes. Growth on copper foils is found to nucleate from arrays of well-aligned domains, and the ensuing films possess sub-nanometre smoothness, excellent crystalline quality, low strain, few defects and room-temperature electrical mobility up to (6.0±1.0) × 10(4) cm(2) V(-1) s(-1), better than that of large, single-crystalline graphene derived from thermal CVD growth. These results indicate that elevated temperatures and crystalline substrates are not necessary for synthesizing high-quality graphene.

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Citations

Aug 7, 2018·Chemical Society Reviews·Yuan LiuXiangfeng Duan
Sep 19, 2019·Nanoscale·Yancong QiaoTian-Ling Ren
Sep 27, 2019·Nature·Deji AkinwandeFrank H L Koppens
Sep 15, 2020·Philosophical Transactions. Series A, Mathematical, Physical, and Engineering Sciences·Zhang YaxinYang Ziqiang
Aug 29, 2020·Molecules : a Journal of Synthetic Chemistry and Natural Product Chemistry·Maryam SaeedEissa Al-Nasrallah
May 4, 2016·Optics Express·B OrazbayevI Khromova
Sep 28, 2017·Nature Communications·P GargianiM Valvidares
Jul 4, 2019·Nanomaterials·Lan WangZiqiang Yang
Nov 26, 2015·Nanoscale·Timothy van der LaanKostya Ken Ostrikov
Oct 3, 2018·Advanced Materials·Bing DengHailin Peng
Nov 9, 2017·Scientific Reports·Stephen W HowellThomas E Beechem
Feb 4, 2021·Accounts of Chemical Research·Kongyang YiDacheng Wei
May 21, 2021·Advanced Materials·Jihong BaeWooyoung Shim
Jan 16, 2018·ACS Omega·Javishk ShahMaria L Carreon
Jan 22, 2020·Chemical Reviews·Yaokang ZhangZijian Zheng

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