Small-size microlens characterization by multiwavelength high-resolution interference microscopy

Optics Express
Myun-Sik KimHans Peter Herzig

Abstract

Microlenses are widely studied in two main areas: fabrication and characterization. Nowadays, characterization draws more attention because it is difficult to apply test techniques to microlenses that are used for conventional optical systems. Especially, small microlenses on a substrate are difficult to characterize because their back focus often stays in the substrate. Here we propose immersion high-resolution interference microscopy to characterize small-size microlenses at three visible wavelengths. Test results for 20-mum-diameter microlenses are presented and discussed. We cover not only standard characterizations like wavefront investigations but also experiments of actual focus properties and chromatic behaviors.

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Citations

Jan 25, 2011·Biomedical Optics Express·C P AllierJ M Dinten
Dec 25, 2012·Optics Express·Myun-Sik KimHans Peter Herzig
May 4, 2016·Optics Express·Myun-Sik KimHans Peter Herzig
Mar 16, 2012·Optics Express·Myun-Sik KimHans Peter Herzig
Feb 8, 2013·Optics Express·Myun-Sik KimHans Peter Herzig
Jun 7, 2011·Optics Express·Myun-Sik KimHans Peter Herzig
Aug 31, 2013·Optics Letters·Emiliano DescroviHans Peter Herzig
Oct 4, 2011·Optics Letters·Myun-Sik KimHans Peter Herzig

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