PMID: 16529125Mar 15, 2006Paper

Solidly mounted ZnO shear mode film bulk acoustic resonators for sensing applications in liquids

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Mathias LinkReinhard Gabl

Abstract

Solidly mounted film bulk acoustic resonators (FBAR) operating at 850 MHz in the shear vibration mode have been fabricated. C-axis inclined zinc oxide (ZnO) thin films realized by modified reactive magnetron sputtering were used: Coupling factors k2 of 1.7% and Q-factors of 312 were determined in air. Q-factors of 192 were measured in water, making these devices attractive for sensing applications in liquids, e.g., biosensing.

References

Sep 24, 2002·Biosensors & Bioelectronics·M V VoinovaB Kasemo
Nov 12, 2003·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Richard H WittstruckArthur Ballato
Feb 5, 2008·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·R S NaikC G Sodini

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Citations

Apr 9, 2015·Nanoscale Research Letters·Ying-Chung ChenChien-Chuan Cheng
Nov 30, 2012·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Xiaoshan CaoJiashi Yang
May 10, 2008·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Jiashi YangYuantai Hu
Mar 3, 2007·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Jiashi Yang
Aug 21, 2007·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Takahiko YanagitaniYoshiaki Watanabe
Aug 4, 2010·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Lifeng QinQing-Ming Wang
Apr 20, 2007·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Jiashi YangYuantai Hu
Apr 20, 2007·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Jiashi YangYuantai Hu

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