Spray-combustion synthesis: efficient solution route to high-performance oxide transistors

Proceedings of the National Academy of Sciences of the United States of America
Xinge YuAntonio Facchetti

Abstract

Metal-oxide (MO) semiconductors have emerged as enabling materials for next generation thin-film electronics owing to their high carrier mobilities, even in the amorphous state, large-area uniformity, low cost, and optical transparency, which are applicable to flat-panel displays, flexible circuitry, and photovoltaic cells. Impressive progress in solution-processed MO electronics has been achieved using methodologies such as sol gel, deep-UV irradiation, preformed nanostructures, and combustion synthesis. Nevertheless, because of incomplete lattice condensation and film densification, high-quality solution-processed MO films having technologically relevant thicknesses achievable in a single step have yet to be shown. Here, we report a low-temperature, thickness-controlled coating process to create high-performance, solution-processed MO electronics: spray-combustion synthesis (SCS). We also report for the first time, to our knowledge, indium-gallium-zinc-oxide (IGZO) transistors having densification, nanoporosity, electron mobility, trap densities, bias stability, and film transport approaching those of sputtered films and compatible with conventional fabrication (FAB) operations.

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Citations

Mar 24, 2016·Nature Materials·Xinge YuAntonio Facchetti
May 12, 2016·Journal of the American Chemical Society·Binghao WangAntonio Facchetti
Sep 10, 2016·Chemical Reviews·Arvind VarmaKhachatur V Manukyan
Nov 20, 2016·Advanced Materials·Jian Zhu, Mark C Hersam
Aug 19, 2016·Journal of Physics. Condensed Matter : an Institute of Physics Journal·Stephan V Roth
May 21, 2019·Advanced Materials·Binghao Wang, Antonio Facchetti
Jan 3, 2020·Physical Chemistry Chemical Physics : PCCP·Huiru WangGuoli Li
Mar 8, 2020·Micromachines·Jae Won JeongMincheol Chang
Mar 7, 2020·Chemistry : a European Journal·Emanuel CarlosRita Branquinho
Apr 3, 2019·Advanced Science·Seungjun ChungTakhee Lee
Apr 21, 2019·Proceedings of the National Academy of Sciences of the United States of America·Binghao WangAntonio Facchetti
Mar 30, 2021·ACS Applied Materials & Interfaces·Katie StallingsTobin J Marks
Apr 3, 2021·Advanced Materials·Jueli ShiKelvin H L Zhang
Jul 17, 2021·ACS Applied Materials & Interfaces·Ashabari MajumdarAni Aprahamian
Oct 10, 2018·ACS Applied Materials & Interfaces·William J ScheidelerVivek Subramanian
Apr 13, 2019·Inorganic Chemistry·Alexander S MukasyanKhachatur V Manukyan
Mar 20, 2018·ACS Nano·Byung Hyo KimDelia J Milliron
Mar 7, 2018·ACS Applied Materials & Interfaces·Wangying XuLei Wang
Dec 8, 2017·Journal of the American Chemical Society·Jingfu HeCurtis P Berlinguette
May 23, 2018·Chemical Reviews·Binghao WangAntonio Facchetti
Mar 26, 2020··Alaa Q. RaheemaFarah G. Khalid

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