PMID: 15245111Jul 13, 2004Paper

Step edge sputtering yield at grazing incidence ion bombardment

Physical Review Letters
Henri HansenH M Urbassek

Abstract

The surface morphology of Pt(111) was investigated by scanning tunneling microscopy after 5 keV Ar+ ion bombardment at grazing incidence in dependence of the ion fluence and in the temperature range between 625 and 720 K. The average erosion rate was found to be strongly dependent on the ion fluence and the substrate temperature during bombardment. This dependence is traced back to the variation of step concentration with temperature and fluence. We develop a simple model allowing us to determine separately the constant sputtering yields for terraces and for impact area stripes in front of ascending steps. The experimentally determined yield of these stripes--the step-edge sputtering yield--is in excellent agreement with our molecular dynamics simulations performed for the experimental situation.

References

Feb 15, 2001·Physical Review Letters·P M DeLucaS A Barnett
Apr 6, 2001·Physical Review Letters·W W PaiD J Liu
Feb 7, 2003·Physical Review Letters·R PfandzelterH Winter

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Citations

Jun 3, 2009·Journal of Physics. Condensed Matter : an Institute of Physics Journal·F FrostA Schindler
Jun 3, 2009·Journal of Physics. Condensed Matter : an Institute of Physics Journal·F Buatier de Mongeot, U Valbusa
Jun 3, 2009·Journal of Physics. Condensed Matter : an Institute of Physics Journal·Herbert Wormeester, Bene Poelsema
Apr 7, 2010·Physical Review Letters·Alex RedingerHerbert M Urbassek
Apr 12, 2006·Physical Review Letters·Alex RedingerThomas Michely

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