Strain analysis from nano-beam electron diffraction: Influence of specimen tilt and beam convergence

Ultramicroscopy
Tim GriebAndreas Rosenauer

Abstract

Strain analyses from experimental series of nano-beam electron diffraction (NBED) patterns in scanning transmission electron microscopy are performed for different specimen tilts. Simulations of NBED series are presented for which strain analysis gives results that are in accordance with experiment. This consequently allows to study the relation between measured strain and actual underlying strain. A two-tilt method which can be seen as lowest-order electron beam precession is suggested and experimentally implemented. Strain determination from NBED series with increasing beam convergence is performed in combination with the experimental realization of a probe-forming aperture with a cross inside. It is shown that using standard evaluation techniques, the influence of beam convergence on spatial resolution is lower than the influence of sharp rings around the diffraction disc which occur at interfaces and which are caused by the tails of the intensity distribution of the electron probe.

Citations

May 16, 2019·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Colin Ophus
Dec 20, 2020·Ultramicroscopy·Christoph MahrAndreas Rosenauer
Oct 24, 2020·Proceedings of the National Academy of Sciences of the United States of America·Matus Krajnak, Joanne Etheridge
May 22, 2021·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Benjamin H SavitzkyColin Ophus
Jun 28, 2021·Ultramicroscopy·Tim GriebAndreas Rosenauer

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