Strain mapping inside an individual processed vertical nanowire transistor using scanning X-ray nanodiffraction

Nanoscale
Dmitry DzhigaevAnders Mikkelsen

Abstract

Semiconductor nanowires in wrapped, gate-all-around transistor geometry are highly favorable for future electronics. The advanced nanodevice processing results in strain due to the deposited dielectric and metal layers surrounding the nanowires, significantly affecting their performance. Therefore, non-destructive nanoscale characterization of complete devices is of utmost importance due to the small feature sizes and three-dimensional buried structure. Direct strain mapping inside heterostructured GaSb-InAs nanowire tunnel field-effect transistor embedded in dielectric HfO2, W metal gate layers, and an organic spacer is performed using fast scanning X-ray nanodiffraction. The effect of 10 nm W gate on a single embedded nanowire with segment diameters down to 40 nm is retrieved. The tensile strain values reach 0.26% in the p-type GaSb segment of the transistor. Supported by the finite element method simulation, we establish a connection between the Ar pressure used during the W layer deposition and the nanowire strain state. Thus, we can benchmark our models for further improvements in device engineering. Our study indicates, how the significant increase in X-ray brightness at 4th generation synchrotron, makes high-throughput m...Continue Reading

References

Jul 11, 2006·Nature·Mark A PfeiferIan K Robinson
Dec 22, 2009·Nature Materials·Marcus C NewtonIan K Robinson
Mar 3, 2010·Nano Letters·Jianing ChenUlf Håkanson
Mar 26, 2011·Nano Letters·Dominik KriegnerGünther Bauer
Nov 19, 2011·Nature·Adrian M Ionescu, Heike Riel
Nov 8, 2012·Nano Letters·Maaike Bouwes BavinckVal Zwiller
Sep 13, 2013·Nature·Eugenie Samuel Reich
Jun 20, 2015·ACS Nano·Tomaš StankevičAnders Mikkelsen
Aug 19, 2015·ACS Nano·Zai-Xing YangJohnny C Ho
Oct 20, 2015·Ultramicroscopy·Thibaud DenneulinMartin Hÿtch
Mar 7, 2017·ACS Nano·Dmitry DzhigaevIvan A Vartanyants
Apr 7, 2017·Nano Letters·G SignorelloH Riel
Jan 11, 2018·Nature Communications·Dakota E McCoyRichard O Prum
Jul 6, 2019·Journal of Synchrotron Radiation·Markus OsterhoffTim Salditt

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Citations

Nov 6, 2021·Journal of Synchrotron Radiation·Ulf JohanssonUlrich Vogt

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Methods Mentioned

BETA
X-ray
Bragg diffraction
imaging techniques

Software Mentioned

Comsol Multiphysics

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