Strain Mapping of Two-Dimensional Heterostructures with Subpicometer Precision

Nano Letters
Yimo HanD A Muller

Abstract

Next-generation, atomically thin devices require in-plane, one-dimensional heterojunctions to electrically connect different two-dimensional (2D) materials. However, the lattice mismatch between most 2D materials leads to unavoidable strain, dislocations, or ripples, which can strongly affect their mechanical, optical, and electronic properties. We have developed an approach to map 2D heterojunction lattice and strain profiles with subpicometer precision and the ability to identify dislocations and out-of-plane ripples. We collected diffraction patterns from a focused electron beam for each real-space scan position with a high-speed, high dynamic range, momentum-resolved detector-the electron microscope pixel array detector (EMPAD). The resulting four-dimensional (4D) phase space data sets contain the full spatially resolved lattice information on the sample. By using this technique on tungsten disulfide (WS2) and tungsten diselenide (WSe2) lateral heterostructures, we have mapped lattice distortions with 0.3 pm precision across multimicron fields of view and simultaneously observed the dislocations and ripples responsible for strain relaxation in 2D laterally epitaxial structures.

References

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Citations

Jan 17, 2019·Advanced Materials·Zhaohe DaiZhong Zhang
May 16, 2019·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Colin Ophus
Oct 24, 2020·Proceedings of the National Academy of Sciences of the United States of America·Matus Krajnak, Joanne Etheridge
Nov 20, 2019·Ultramicroscopy·Steven E ZeltmannColin Ophus
Apr 17, 2021·Nature Materials·Nathanael P KazmierczakD Kwabena Bediako
Jun 26, 2021·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Frances I AllenAndrew M Minor
Aug 21, 2021·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Jingyue Jimmy Liu
Sep 13, 2019·Nano Letters·Achint JainLukas Novotny
Aug 25, 2020·ACS Applied Materials & Interfaces·Yue CaoIan K Robinson

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