Structural, optical, and mechanical properties of TiO2 nanolaminates.

Nanotechnology
Lilit GhazaryanAdriana Szeghalmi

Abstract

The structural, optical, and mechanical properties of TiO2 nanolaminate films grown by plasma-enhanced atomic layer deposition are discussed. Several TiO2/Al2O3 and TiO2/SiO2 compositions have been investigated to study the effect of the relative number of ALD oxide cycles on the film properties to obtain a high refractive index coating with low optical losses, low roughness, and low mechanical stress. The formation of crystalline TiO2 observed at high deposition temperature, or film thickness was inhibited by periodically introducing ultra-thin amorphous layers into the film. Only 4 ALD cycles of Al2O3 (corresponding to ca. 0.5 nm) between 335 ALD cycles of TiO2 (ca. 11 nm) form a closed, distinct layer suppressing the crystallization in TiO2 film. Consequently, the roughness of the pure TiO2 film is reduced from ca. 20 nm rms to 1 nm rms in the 335/4 nanolaminate, with only a slight decrease of the refractive index from 2.46 to 2.44 in 100 nm pure TiO2 and the nanolaminate, respectively. The refractive indices of the nanolaminates in various compositions vary between 2.38 and 2.50 at 632 nm, and the corresponding optical losses from the films are low. The mechanical stress was reduced to about 140 MPa in several TiO2/Al2O3 na...Continue Reading

References

Nov 12, 2010·Small·Adriana SzeghalmiMato Knez
Nov 22, 2011·Journal of Nanoscience and Nanotechnology·Riikka L PuurunenMarkku Leskelä
Dec 20, 2014·Nanotechnology·Stephan RatzschAdriana Szeghalmi
May 14, 2016·Nanotechnology·Lilit GhazaryanAdriana Szeghalmi
Feb 6, 2017·Applied Optics·Svetlana ShestaevaAdriana Szeghalmi
Sep 25, 2018·Biosensors & Bioelectronics·Octavio GranielMikhael Bechelany
May 16, 2019·ACS Applied Materials & Interfaces·Kristin PfeifferAdriana Szeghalmi

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Citations

Feb 12, 2021·Spectrochimica Acta. Part A, Molecular and Biomolecular Spectroscopy·Pallabi PaulAdriana Szeghalmi
Jul 20, 2021·Chemistry of Materials : a Publication of the American Chemical Society·Karsten ArtsHarm C M Knoops

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