Studies on characteristics of resistive power calculated with discrete Fourier transform in a pulse-modulated radio frequency discharge

The Review of Scientific Instruments
W G HuoZ F Ding

Abstract

In a pulse-modulated (PM) radio-frequency (RF) capacitively coupled plasma, the DFT (Discrete Fourier Transform)-calculated RF power and the corresponding phase shift between voltage and current measured with calibrated voltage and current probes present oscillations in the pulse rising and falling edges. The oscillating phase shift between voltage and current obtained in the falling edge is outside the expected value for a resistive-capacitive RF discharge. Numerical simulation and analytical analysis are made to interpret these abnormal characteristics and seek an approach to obtaining the reliable resistive (active) RF power. The oscillation is proved to be originated from the oscillating non-zero reactive RF power of the capacitor(s) in the load. At the time instant when the reactive RF power within an integer RF period is not zero, the reactive RF power is mistakenly regarded as the active RF power in the DFT analysis, as a result, the corresponding phase is thus incorrect and even outside the expected value for a resistive-capacitive load. The resistive RF power and the phase can be only correctly calculated at the time instant when the reactive RF power is zero. For a series (or parallel) RC (resistor-capacitor) load and...Continue Reading

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