Sub-10 Nanometer Feature Size in Silicon Using Thermal Scanning Probe Lithography

ACS Nano
Yu Kyoung Ryu ChoA W Knoll

Abstract

High-resolution lithography often involves thin resist layers which pose a challenge for pattern characterization. Direct evidence that the pattern was well-defined and can be used for device fabrication is provided if a successful pattern transfer is demonstrated. In the case of thermal scanning probe lithography (t-SPL), highest resolutions are achieved for shallow patterns. In this work, we study the transfer reliability and the achievable resolution as a function of applied temperature and force. Pattern transfer was reliable if a pattern depth of more than 3 nm was reached and the walls between the patterned lines were slightly elevated. Using this geometry as a benchmark, we studied the formation of 10-20 nm half-pitch dense lines as a function of the applied force and temperature. We found that the best pattern geometry is obtained at a heater temperature of ∼600 °C, which is below or close to the transition from mechanical indentation to thermal evaporation. At this temperature, there still is considerable plastic deformation of the resist, which leads to a reduction of the pattern depth at tight pitch and therefore limits the achievable resolution. By optimizing patterning conditions, we achieved 11 nm half-pitch dense...Continue Reading

References

Oct 26, 2001·Nature·A FuhrerM Bichler
Apr 16, 2009·Nano Letters·T AltebaeumerU Duerig
Aug 21, 2009·Nano Letters·D WiesmannU Duerig
Apr 27, 2010·Advanced Materials·Armin W KnollUrs Duerig
Feb 22, 2013·Small·Wooyoung ShimChad A Mirkin
Mar 16, 2013·Nano Letters·Vitor R ManfrinatoKarl K Berggren
Aug 24, 2013·Nano Letters·Lin Lee CheongUrs Duerig
Apr 5, 2014·ACS Applied Materials & Interfaces·Narendra KurraGiridhar U Kulkarni
Aug 6, 2014·Nature Nanotechnology·Ricardo GarciaElisa Riedo
Feb 2, 2016·The Review of Scientific Instruments·Tevis D B JacobsRobert W Carpick

❮ Previous
Next ❯

Citations

Aug 30, 2018·Advanced Materials·Valentin DuboisFrank Niklaus
Dec 2, 2018·Beilstein Journal of Nanotechnology·Philip D PrewettEjaz Huq
Oct 3, 2019·Advanced Materials·Heyou ZhangPaul Mulvaney
Nov 7, 2019·Nanoscale·Sara MarchioCarlo Massimo Casciola
Apr 21, 2021·Journal of Nanoscience and Nanotechnology·Usama TahirMyung Yung Jeong
May 4, 2021·ACS Nano·Steven GottliebArmin W Knoll
Jul 1, 2021·Nano Letters·Mahmoud BehzadiradTito Busani
May 6, 2019·ACS Applied Materials & Interfaces·Sze Wing TangNicolas H Voelcker
Oct 9, 2020·Nano Letters·Xia LiuJürgen Brugger
Nov 29, 2017·ACS Nano·Emanuele LisiCarlo Massimo Casciola
Jul 10, 2019·ACS Applied Materials & Interfaces·Vytautas NavikasRamu Nas Valiokas
Oct 1, 2021·Nano Letters·Nolan LassalineDavid J Norris
Oct 26, 2021·Microsystems & Nanoengineering·Nikolaos FarmakidisHarish Bhaskaran

❮ Previous
Next ❯

Methods Mentioned

BETA
electron beam lithography
scanning electron microscopy
atomic force microscopy
AFM
differential scanning calorimetry

Related Concepts

Trending Feeds

COVID-19

Coronaviruses encompass a large family of viruses that cause the common cold as well as more serious diseases, such as the ongoing outbreak of coronavirus disease 2019 (COVID-19; formally known as 2019-nCoV). Coronaviruses can spread from animals to humans; symptoms include fever, cough, shortness of breath, and breathing difficulties; in more severe cases, infection can lead to death. This feed covers recent research on COVID-19.

Blastomycosis

Blastomycosis fungal infections spread through inhaling Blastomyces dermatitidis spores. Discover the latest research on blastomycosis fungal infections here.

Nuclear Pore Complex in ALS/FTD

Alterations in nucleocytoplasmic transport, controlled by the nuclear pore complex, may be involved in the pathomechanism underlying multiple neurodegenerative diseases including Amyotrophic Lateral Sclerosis and Frontotemporal Dementia. Here is the latest research on the nuclear pore complex in ALS and FTD.

Applications of Molecular Barcoding

The concept of molecular barcoding is that each original DNA or RNA molecule is attached to a unique sequence barcode. Sequence reads having different barcodes represent different original molecules, while sequence reads having the same barcode are results of PCR duplication from one original molecule. Discover the latest research on molecular barcoding here.

Chronic Fatigue Syndrome

Chronic fatigue syndrome is a disease characterized by unexplained disabling fatigue; the pathology of which is incompletely understood. Discover the latest research on chronic fatigue syndrome here.

Evolution of Pluripotency

Pluripotency refers to the ability of a cell to develop into three primary germ cell layers of the embryo. This feed focuses on the mechanisms that underlie the evolution of pluripotency. Here is the latest research.

Position Effect Variegation

Position Effect Variagation occurs when a gene is inactivated due to its positioning near heterochromatic regions within a chromosome. Discover the latest research on Position Effect Variagation here.

STING Receptor Agonists

Stimulator of IFN genes (STING) are a group of transmembrane proteins that are involved in the induction of type I interferon that is important in the innate immune response. The stimulation of STING has been an active area of research in the treatment of cancer and infectious diseases. Here is the latest research on STING receptor agonists.

Microbicide

Microbicides are products that can be applied to vaginal or rectal mucosal surfaces with the goal of preventing, or at least significantly reducing, the transmission of sexually transmitted infections. Here is the latest research on microbicides.