Sub-10 nm beam confinement by X-ray waveguides: design, fabrication and characterization of optical properties.

Journal of Synchrotron Radiation
S P KrügerTim Salditt

Abstract

The propagation of hard X-ray synchrotron beams in waveguides with guiding layer diameters in the 9-35 nm thickness range has been studied. The planar waveguide structures consist of an optimized two-component cladding. The presented fabrication method is suitable for short and leak-proof waveguide slices with lengths (along the optical axis) in the sub-500 µm range, adapted for optimized transmission at photon energies of 11.5-18 keV. A detailed comparison between finite-difference simulations of waveguide optics and the experimental results is presented, concerning transmission, divergence of the waveguide exit beam, as well as the angular acceptance. In a second step, two crossed waveguides have been used to create a quasi-point source for propagation-based X-ray imaging at the new nano-focus endstation of the P10 coherence beamline at Petra III. By inverting the measured Fraunhofer diffraction pattern by an iterative error-reduction algorithm, a two-dimensional focus of 10 nm × 10 nm is obtained. Finally, holographic imaging of a lithographic test structure based on this optical system is demonstrated.

References

Jul 13, 2002·Science·F PfeifferT Salditt
Mar 24, 2005·Physical Review Letters·C G Schroer, B Lengeler
Jul 1, 2005·Nature·Weilun ChaoDavid T Attwood
Dec 13, 2006·Physical Review Letters·I BukreevaS Lagomarsino
Feb 7, 2007·Physical Review Letters·C FuhseT Salditt
Jun 4, 2008·Physical Review Letters·T SaldittC Bähtz
Jul 19, 2008·Science·Pierre ThibaultFranz Pfeiffer
Apr 28, 2009·Journal of Synchrotron Radiation·P KraftB Schmitt
Jul 1, 2010·Optics Express·S P KrügerT Salditt
Jul 19, 2011·Optics Letters·Inna BukreevaStefano Lagomarsino
Sep 22, 2011·Optics Express·Hanfei YanJörg Maser

❮ Previous
Next ❯

Citations

Aug 21, 2013·Journal of Synchrotron Radiation·Inna BukreevaStefano Lagomarsino
Apr 7, 2015·Journal of Applied Crystallography·R N WilkeT Salditt
Jul 3, 2015·Journal of Synchrotron Radiation·Tim SaldittMichael Sprung
Apr 18, 2013·Journal of Synchrotron Radiation·Klaus GiewekemeyerTim Salditt
Feb 26, 2016·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Sina BaierJan-Dierk Grunwaldt
Jul 1, 2017·Acta Crystallographica. Section A, Foundations and Advances·Martin KrenkelTim Salditt
Nov 29, 2017·Scientific Reports·Hirokatsu YumotoHaruhiko Ohashi
Aug 6, 2020·Optics Express·Katarzyna M Sowa, Paweł Korecki
Feb 14, 2015·Physical Review Letters·M BartelsT Salditt
Jun 29, 2017·Journal of Applied Crystallography·Qi ZhongTim Salditt
May 6, 2021·Journal of Synchrotron Radiation·Paul D QuinnJulia E Parker
Dec 28, 2016·ACS Nano·Clément Y J HémonnotSarah Köster
Aug 9, 2017·ACS Nano·Clément Y J Hémonnot, Sarah Köster

❮ Previous
Next ❯

Methods Mentioned

BETA
X-ray
transmission electron microscopy

Software Mentioned

Maxipix

Related Concepts

Trending Feeds

COVID-19

Coronaviruses encompass a large family of viruses that cause the common cold as well as more serious diseases, such as the ongoing outbreak of coronavirus disease 2019 (COVID-19; formally known as 2019-nCoV). Coronaviruses can spread from animals to humans; symptoms include fever, cough, shortness of breath, and breathing difficulties; in more severe cases, infection can lead to death. This feed covers recent research on COVID-19.

Blastomycosis

Blastomycosis fungal infections spread through inhaling Blastomyces dermatitidis spores. Discover the latest research on blastomycosis fungal infections here.

Nuclear Pore Complex in ALS/FTD

Alterations in nucleocytoplasmic transport, controlled by the nuclear pore complex, may be involved in the pathomechanism underlying multiple neurodegenerative diseases including Amyotrophic Lateral Sclerosis and Frontotemporal Dementia. Here is the latest research on the nuclear pore complex in ALS and FTD.

Applications of Molecular Barcoding

The concept of molecular barcoding is that each original DNA or RNA molecule is attached to a unique sequence barcode. Sequence reads having different barcodes represent different original molecules, while sequence reads having the same barcode are results of PCR duplication from one original molecule. Discover the latest research on molecular barcoding here.

Chronic Fatigue Syndrome

Chronic fatigue syndrome is a disease characterized by unexplained disabling fatigue; the pathology of which is incompletely understood. Discover the latest research on chronic fatigue syndrome here.

Evolution of Pluripotency

Pluripotency refers to the ability of a cell to develop into three primary germ cell layers of the embryo. This feed focuses on the mechanisms that underlie the evolution of pluripotency. Here is the latest research.

Position Effect Variegation

Position Effect Variagation occurs when a gene is inactivated due to its positioning near heterochromatic regions within a chromosome. Discover the latest research on Position Effect Variagation here.

STING Receptor Agonists

Stimulator of IFN genes (STING) are a group of transmembrane proteins that are involved in the induction of type I interferon that is important in the innate immune response. The stimulation of STING has been an active area of research in the treatment of cancer and infectious diseases. Here is the latest research on STING receptor agonists.

Microbicide

Microbicides are products that can be applied to vaginal or rectal mucosal surfaces with the goal of preventing, or at least significantly reducing, the transmission of sexually transmitted infections. Here is the latest research on microbicides.