Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components

Applied Optics
A DuparréJ M Bennett

Abstract

Surface topography and light scattering were measured on 15 samples ranging from those having smooth surfaces to others with ground surfaces. The measurement techniques included an atomic force microscope, mechanical and optical profilers, confocal laser scanning microscope, angle-resolved scattering, and total scattering. The samples included polished and ground fused silica, silicon carbide, sapphire, electroplated gold, and diamond-turned brass. The measurement instruments and techniques had different surface spatial wavelength band limits, so the measured roughnesses were not directly comparable. Two-dimensional power spectral density (PSD) functions were calculated from the digitized measurement data, and we obtained rms roughnesses by integrating areas under the PSD curves between fixed upper and lower band limits. In this way, roughnesses measured with different instruments and techniques could be directly compared. Although smaller differences between measurement techniques remained in the calculated roughnesses, these could be explained mostly by surface topographical features such as isolated particles that affected the instruments in different ways.

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Citations

Oct 11, 2014·Nanoscale Research Letters·Marc TeichmannBernd Rauschenbach
May 7, 2010·Ophthalmic & Physiological Optics : the Journal of the British College of Ophthalmic Opticians (Optometrists)·Maria J GiraldezEva Yebra-Pimentel
Sep 28, 2013·Acta Biomaterialia·Daniel SiegismundMarkus Rettenmayr
Mar 3, 2015·The Review of Scientific Instruments·Linsheng LiuKazuhiro Nonaka
Jun 18, 2002·Applied Optics·Angela DuparréKarsten Reihs
Dec 30, 2017·Materials·Raoul-Amadeus LorbeerHans-Albert Eckel
Nov 19, 2008·Physical Chemistry Chemical Physics : PCCP·Santanu Karan, Biswanath Mallik
Jul 3, 2008·Applied Optics·Nicolas BenoitAndreas Tünnermann
Oct 31, 2018·Scientific Reports·Paweł Weroński
May 2, 2008·Applied Optics·Sven SchröderAndreas Tünnermann
Apr 5, 2011·Applied Optics·Alexander V TikhonravovDetlev Ristau
May 15, 2013·Applied Optics·Tobias HerffurthAndreas Tünnermann
Oct 3, 2013·Applied Optics·Erika SohnJoel Herrera
Feb 12, 2014·Optics Express·Marcus TrostAndreas Tünnermann
Feb 12, 2014·Applied Optics·Alexander von FinckStefan Sinzinger
Oct 3, 2013·Applied Optics·Marcus TrostAndreas Tünnermann
Nov 18, 2014·Optics Express·Michael BrindzaG Beadie
Dec 30, 2017·Physical Review Letters·Bruno BressonDamien Vandembroucq
Apr 5, 2011·Applied Optics·Sven SchröderAngela Duparré
Jun 7, 2011·Optics Express·Sven SchröderJames E Harvey
Sep 10, 2003·Applied Optics·Alexander V TikhonravovAngela Duparré
Jun 11, 2007·Optics Express·C Dorrer, J D Zuegel
Apr 5, 2011·Applied Optics·Angela Duparré, Detlev Ristau
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Apr 30, 2017·Scientific Reports·Benoît BussièreOlivier Utéza
May 15, 2015·Optics Express·Heike LöchelAlexei Erko
Jan 13, 2018·Optics Express·Claude AmraMichel Lequime

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