PMID: 11909478Mar 23, 2002Paper

Surface modification without desorption: recycling of Cl on Si(100)-(2 x 1)

Physical Review Letters
Koji S NakayamaJ H Weaver

Abstract

We demonstrate chlorine-induced modification of Si(100)-(2 x 1) under conditions where Cl is recycled rather than desorbed as SiCl2. A dimer with 2 Cl atoms, 2SiCl, converts to SiCl2+Si, allowing the bare Si atom to escape onto the terrace. At temperatures below the desorption threshold, the SiCl2 unit decays through Cl diffusion, allowing the second Si atom to escape. The result is a dimer vacancy, terrace regrowth structures, and Cl that is able to participate in another pitting event. Access to this unexpected roughening pathway is controlled by the Cl concentration and temperature. This previously overlooked process represents an important component of Si(100) surface processing.

References

Apr 1, 1991·Physical Review Letters·G BrocksR Car
May 29, 1995·Physical Review Letters·R A Wolkow

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Citations

Aug 23, 2002·Physical Review Letters·Cari F HerrmannJohn J Boland
May 16, 2007·Physical Review Letters·Abhishek AgrawalJ H Weaver
Nov 15, 2019·The Journal of Physical Chemistry. a·Kevin J DwyerRobert E Butera
Aug 5, 2021·Journal of Physics. Condensed Matter : an Institute of Physics Journal·E FrederickR E Butera
Oct 22, 2020·Langmuir : the ACS Journal of Surfaces and Colloids·Dhamelyz Silva-QuinonesAndrew V Teplyakov

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