Surface roughness measurement using white light speckle

Applied Optics
R A Sprague

Abstract

An experimental investigation is made of a technique for measurement of surface roughness. A speckle pattern is formed near the image plane of a lens in spatially coherent light having a broad spectral bandwidth. The contrast of the speckle is found to be related to surface roughness when the roughness and the coherence length of illumination are comparable in magnitude. Implementation techniques are discussed and results shown that indicate good correlation with profilometer measurements for a wide range of roughness values produced with a variety of finishing procedures.

References

Sep 1, 1968·Applied Optics·C R Munnerlyn, M Latta
Nov 1, 1969·Applied Optics·W B Ribbens
Aug 1, 1971·Applied Optics·R C Birkebak
Apr 1, 1972·Applied Optics·W B Ribbens

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Citations

May 1, 1975·Applied Optics·D MalacaraM V Murty
Dec 1, 1987·Applied Optics·A M Tai, J N Cederquist
Oct 24, 2012·Applied Optics·Lucien PougetMehdi Alouini
Aug 7, 2006·Optics Express·Oleg V AngelskySteen G Hanson
Jun 1, 1977·Applied Optics·J Ohtsubo, T Asakura
May 24, 2018·Applied Optics·Noah R Van ZandtSteven T Fiorino
Mar 6, 2008·Applied Optics·J M Huntley
Jul 8, 2011·Journal of the Optical Society of America. A, Optics, Image Science, and Vision·Zhen-Sen Wu, Ya-Qing Li
Nov 15, 1979·Applied Optics·K Nakagawa, T Asakura
May 24, 2018·Applied Optics·Noah R Van ZandtSteven T Fiorino

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