Suspended ultra-small disk resonator on silicon for optical sensing

Optics Letters
Xiaokun WangDaoxin Dai

Abstract

An ultra-small disk resonator consisting of a suspended silicon disk with a submicron bending radius sitting on an SiO(2) pedestal is demonstrated experimentally. An asymmetrical suspended rib waveguide is integrated as the access waveguide for the suspended submicron disk resonator, which is used to realize an ultra-small optical sensor with an improved sensitivity due to the enhanced evanescent field interaction with the analyte. The present optical sensor also has a large measurement range because of the ultra-large free-spectral range of the submicron-disk resonator. As an example, a suspended submicron disk sensor with a bending radius of 0.8 μm is designed, fabricated, and characterized. The concentration of NaCl aqueous solution and organic liquids is measured with the suspended submicron-disk sensor, and the measured sensitivity is about 130 nm/RIU, which agrees well with the simulation value.

References

May 20, 2005·Nature·Qianfan XuMichal Lipson
Jun 11, 2008·Optics Express·Ian M White, Xudong Fan
Jun 11, 2008·Optics Express·Qianfan XuRaymond G Beausoleil
Jan 7, 2010·Optics Express·Jeffrey ShainlineJimmy Xu
Oct 14, 2010·Optics Express·Mohammad SoltaniAli Adibi

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Citations

Oct 21, 2018·Sensors·Enxiao LuanLukas Chrostowski
Apr 3, 2020·Nano Convergence·Yiming MaChengkuo Lee
Aug 9, 2017·Optics Express·Brian S LeeMichal Lipson
Dec 28, 2019·Optics Express·Xiaoming MaJiaxiong Fang

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